Microfabrication of a variable range and multi-directionally sensitive thermal flow sensor

• Published in: Sensors and actuators. A. Physical. Vol. 220; pp. 159 - 167
• Main Authors: Yarali, Milad, Khanna, Sanjeev K.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.12.2014
• Subjects: Air flow; Constants; Devices; Heating; Mathematical models; Micromechanics; Multi-range sensor; Sensors; Thermal flow sensor; Thermistors; Thin film thermistor; Titanium; Two-dimensional flow measurement; Thermal flow sensor; Thin film thermistor; Two-dimensional flow measurement; Multi-range sensor

•New micromachined thermal flow sensor with 12 thermistors.•Large range of flow measurement from 0.1 to 20m/s.•Multidirectional flow measurement. This investigation reports the design, fabrication and characterization of a variable range and multi-directionally sensitive micromachined thermal flow s...