Patterned Pyroelectric Electron Emitters and their Feasibility Study for Lithography Applications
Patterned electron emitters were fabricated using LiNbO3 (LN) single crystals and their characteristics were investigated for electron-beam lithography applications. Pyroelectrically induced electron emission was suppressed by coating Pt and Ti thin films. However, the electron emission behaviors we...
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Published in | Japanese Journal of Applied Physics Vol. 42; no. Part 1, No. 6A; pp. 3523 - 3525 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
2003
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Abstract | Patterned electron emitters were fabricated using LiNbO3 (LN) single crystals and their characteristics were investigated for electron-beam lithography applications. Pyroelectrically induced electron emission was suppressed by coating Pt and Ti thin films. However, the electron emission behaviors were not affected by the deposition of SiO2 dielectric layers. Based on these observations, a structure of patterned emitters was suggested; Ti layers and SiO2 layers were used as blocking layers and emission layers, resp. By using a 1:1 electron beam projection system, 100 mu m and 5 mu m dots on the exposed resist were obtained from 300 and 30 mu m dots on emitters. Reduction of patterns might be useful in obtaining fine patterns without complex electron optics. 9 refs. |
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AbstractList | Patterned electron emitters were fabricated using LiNbO3 (LN) single crystals and their characteristics were investigated for electron-beam lithography applications. Pyroelectrically induced electron emission was suppressed by coating Pt and Ti thin films. However, the electron emission behaviors were not affected by the deposition of SiO2 dielectric layers. Based on these observations, a structure of patterned emitters was suggested; Ti layers and SiO2 layers were used as blocking layers and emission layers, resp. By using a 1:1 electron beam projection system, 100 mu m and 5 mu m dots on the exposed resist were obtained from 300 and 30 mu m dots on emitters. Reduction of patterns might be useful in obtaining fine patterns without complex electron optics. 9 refs. |
Author | Ko, Tae Kuk Kim, Dong-Wook Rosenman, G. Yoo, In K. Moon, Chang-Wook |
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CitedBy_id | crossref_primary_10_1016_j_elstat_2004_09_006 crossref_primary_10_1016_j_sna_2017_05_010 crossref_primary_10_1063_1_1809776 crossref_primary_10_1007_s10832_006_0387_y crossref_primary_10_1016_j_physb_2006_02_034 crossref_primary_10_1080_00150190500259707 crossref_primary_10_1016_j_physb_2004_07_011 |
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