The measurement of responsivity of infrared photodetectors using a cavity blackbody

• Published in: Journal of semiconductors Vol. 44; no. 10; pp. 102301 - 63
• Main Authors: Li, Nong, Jiang, Dongwei, Wang, Guowei, Chen, Weiqiang, Zhou, Wenguang, Jiang, Junkai, Chang, Faran, Hao, Hongyue, Wu, Donghai, Xu, Yingqiang, Shen, Guiying, Xie, Hui, Liu, Jingming, Zhao, Youwen, Wang, Fenghua, Niu, Zhichuan
• Format: Journal Article
• Language: English
• Published: Chinese Institute of Electronics 01.10.2023; College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 101408,China; State Key Laboratory for Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China; Center of Materials Science and Optoelectronics Engineering,College of Materials Science and Opto-Electronic Technology,University of Chi-nese Academy of Sciences,Beijing 100049,China%State Key Laboratory for Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China%Key Laboratory of Semiconductor Materials Science,Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices,Insti-tute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China; College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 101408,China%State Key Laboratory for Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
• Subjects: cavity blackbody; infrared photodetectors; responsivity calibration; infrared photodetectors; cavity blackbody; responsivity calibration
• DOI: 10.1088/1674-4926/44/10/102301
• ISSN: 1674-4926

For the measurement of responsivity of an infrared photodetector, the most-used radiation source is a blackbody. In such a measurement system, distance between the blackbody, the photodetector and the aperture diameter are two parameters that contribute most measurement errors. In this work, we describe the configuration of our responsivity measurement system in great detail and present a method to calibrate the distance and aperture diameter. The core of this calibration method is to transfer direct measurements of these two parameters into an extraction procedure by fitting the experiment data to the calculated results. The calibration method is proved experimentally with a commercially extended InGaAs detector at a wide range of blackbody temperature, aperture diameter and distance. Then proof procedures are further extended into a detector fabricated in our laboratory and consistent results were obtained.