Application of Micromachined Y -Cut-Quartz Bulk Acoustic Wave Resonator for Infrared Sensing
This paper presents the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on Y-cut-quartz bulk acoustic wave resonators. A novel method of tracking the resonance frequency based upon the measurement of impedance is present...
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Published in | Journal of microelectromechanical systems Vol. 20; no. 1; pp. 288 - 296 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
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New York, NY
IEEE
01.02.2011
Institute of Electrical and Electronics Engineers |
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Abstract | This paper presents the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on Y-cut-quartz bulk acoustic wave resonators. A novel method of tracking the resonance frequency based upon the measurement of impedance is presented. High-frequency (240-MHz) micromachined resonators from Y-cut-quartz crystal cuts were fabricated using heterogeneous integration techniques on a silicon wafer. A temperature sensitivity of 22.16 kHz/°C was experimentally measured. IR measurements on the resonator pixel resulted in a noise equivalent power of 3.90 nW/Hz 1/2 , a detectivity D* of 1 × 10 5 cm · Hz 1/2 /W, and a noise equivalent temperature difference of 4 mK in the 8- to 14-μm wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability in video-rate uncooled IR imaging. This work represents the first comprehensive thermal characterization of micromachined F-cut-quartz resonators and their IR sensing response. |
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AbstractList | This paper presents the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on Y -cut-quartz bulk acoustic wave resonators. A novel method of tracking the resonance frequency based upon the measurement of impedance is presented. High-frequency (240-MHz) micromachined resonators from Y -cut-quartz crystal cuts were fabricated using heterogeneous integration techniques on a silicon wafer. A temperature sensitivity of 22.16 hbox kHz / [compfn] hbox C was experimentally measured. IR measurements on the resonator pixel resulted in a noise equivalent power of 3.90 hbox nW / Hz 1 / 2 , a detectivity D ast of 1 10 5 Unknown character hbox cm times hbox Hz 1 / 2 / hbox W , and a noise equivalent temperature difference of 4 mK in the 8- to 14- mu hbox m wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability in video-rate uncooled IR imaging. This work represents the first comprehensive thermal characterization of micromachined Y -cut-quartz resonators and their IR sensing response. hfill 2010-0217 This paper presents the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on Y-cut-quartz bulk acoustic wave resonators. A novel method of tracking the resonance frequency based upon the measurement of impedance is presented. High-frequency (240-MHz) micromachined resonators from Y-cut-quartz crystal cuts were fabricated using heterogeneous integration techniques on a silicon wafer. A temperature sensitivity of 22.16 kHz/°C was experimentally measured. IR measurements on the resonator pixel resulted in a noise equivalent power of 3.90 nW/Hz 1/2 , a detectivity D* of 1 × 10 5 cm · Hz 1/2 /W, and a noise equivalent temperature difference of 4 mK in the 8- to 14-μm wavelength range. The thermal frequency response of the resonator was determined to be faster than 33 Hz, demonstrating its applicability in video-rate uncooled IR imaging. This work represents the first comprehensive thermal characterization of micromachined F-cut-quartz resonators and their IR sensing response. |
Author | Pisani, M B Kailiang Ren Tadigadapa, Srinivas Ping Kao |
Author_xml | – sequence: 1 givenname: M B surname: Pisani fullname: Pisani, M B email: mbpisani@psu.edu organization: Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA – sequence: 2 surname: Kailiang Ren fullname: Kailiang Ren email: kxr233@psu.edu organization: Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA – sequence: 3 surname: Ping Kao fullname: Ping Kao email: pzkl09@psu.edu organization: Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA – sequence: 4 givenname: Srinivas surname: Tadigadapa fullname: Tadigadapa, Srinivas email: satl0@psu.edu organization: Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA |
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Cites_doi | 10.1109/ULTSYM.1985.198533 10.1016/S0079-6727(02)00024-1 10.1109/58.393101 10.1088/0034-4885/64/10/203 10.1016/S0924-4247(97)01697-X 10.1109/84.506201 10.1109/T-UFFC.1987.26997 10.1109/58.20453 10.1029/RS014i004p00521 10.1016/j.sna.2008.11.013 10.1109/JMEMS.2009.2015498 10.1117/12.542482 10.1109/FREQ.1996.559931 10.1117/12.783853 10.1117/12.160553 |
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Keywords | Infrared thermography Bulk acoustic wave resonator Tracking Micromachining Bulk wave Y-cut quartz Frequency measurement Quartz infrared (IR) detector Quartz resonator quartz micromachining Resonance frequency thermal IR sensor Silicon Thermal imaging High frequency Microelectromechanical device Pixel Room temperature heterogeneous microelectromechanical systems integration Production process |
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References | lesage (ref19) 1979; 14 ref12 ref15 wood (ref2) 1993 ref14 ref11 ref10 van-der-ziel (ref18) 1976 li (ref6) 2007 niklaus (ref4) 2007 ref17 ref16 ref8 ref7 ref9 ref3 ref5 kao (ref13) 2009; 149 tadigadapa (ref1) 2006 |
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Snippet | This paper presents the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on... This paper presents the design, fabrication, and characterization of thermal infrared (IR) imaging arrays operating at room temperature which are based on Y... |
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SubjectTerms | Acoustics Applied sciences Bulk acoustic wave resonator Detection Detectors Electronics Exact sciences and technology heterogeneous microelectromechanical systems integration Imaging Impedance infrared (IR) detector Infrared radiation Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromachining Micromechanical devices and systems Micromechanics Noise Noise equivalent temperature difference Optical resonators Physics Precision engineering, watch making quartz micromachining Resonant frequency Resonators Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Temperature measurement Temperature sensors thermal IR sensor Y -cut quartz |
Title | Application of Micromachined Y -Cut-Quartz Bulk Acoustic Wave Resonator for Infrared Sensing |
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