Optimization of a pulsed carbon dioxide snow jet for cleaning CMOS image sensors by using the Taguchi method

• Published in: Sensors and actuators. A. Physical. Vol. 139; no. 1; pp. 265 - 271
• Main Authors: Yang, Sheng-Chung, Huang, Keng-Shiang, Lin, Yu-Cheng
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 12.09.2007
• Subjects: Carbon dioxide snow; Cleaning; CMOS image sensor; Taguchi method; Cleaning; CMOS image sensor; Carbon dioxide snow; Taguchi method

This study demonstrated the optimization of a pulsed carbon dioxide (CO 2) snow jet system for the removal of particles on the surface of complementary metal oxide semiconductor (CMOS) image sensors by using the Taguchi method. The parameters of the CO 2 snow cleaning system, which can have an influ...