Gradient residual stress induced elastic deformation of multilayer MEMS structures

• Published in: Sensors and actuators. A. Physical. Vol. 134; no. 1; pp. 177 - 185
• Main Authors: Huang, Shusen, Zhang, Xin
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 28.02.2007
• Subjects: Elastic deformation; Gradient residual stress; MEMS; Multilayered structures; MEMS; Gradient residual stress; Elastic deformation; Multilayered structures

Multilayered structures are widely used as sensing or actuating components in MEMS devices. Since the thin films of multilayered structures are always subject to residual stresses, it is important to model the relation between these residual stresses and the resultant elastic deformation. The main p...