APA (7th ed.) Citation

Huang, S., & Zhang, X. (2007). Gradient residual stress induced elastic deformation of multilayer MEMS structures. Sensors and actuators. A. Physical., 134(1), 177-185. https://doi.org/10.1016/j.sna.2006.05.026

Chicago Style (17th ed.) Citation

Huang, Shusen, and Xin Zhang. "Gradient Residual Stress Induced Elastic Deformation of Multilayer MEMS Structures." Sensors and Actuators. A. Physical. 134, no. 1 (2007): 177-185. https://doi.org/10.1016/j.sna.2006.05.026.

MLA (9th ed.) Citation

Huang, Shusen, and Xin Zhang. "Gradient Residual Stress Induced Elastic Deformation of Multilayer MEMS Structures." Sensors and Actuators. A. Physical., vol. 134, no. 1, 2007, pp. 177-185, https://doi.org/10.1016/j.sna.2006.05.026.