SOI rate gyro sensor for automotive control

• Published in: Sensors and actuators. A. Physical. Vol. 132; no. 1; pp. 42 - 46
• Main Authors: Nonomura, Y., Fujiyoshi, M., Omura, Y., Fujitsuka, N., Mizuno, K., Tsukada, K.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 08.11.2006
• Subjects: Rate gyro sensor; SOI; Vibration; Rate gyro sensor; SOI; Vibration

A silicon on insulator (SOI) rate gyro sensor has been developed for automotive controls. The sensor detects yaw rate of automobiles. The sensor has a new open beam structure (OBS). Excitation and detection electrodes of the OBS are open toward exterior bonding pads in a plane. The FEM analysis resu...