Buckled-type valves integrated by parylene micro-tubes

• Published in: Sensors and actuators. A. Physical. Vol. 130; pp. 241 - 246
• Main Authors: Yang, Lung-Jieh, Wang, Hsin-Hsiung, Wang, Jiun-Min, Liu, Kuan-Chun, Ko, Kai-Chung
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 14.08.2006
• Subjects: Buckled-type valve; Circular microchannel; Parylene; SU-8; Buckled-type valve; SU-8; Circular microchannel; Parylene

This paper demonstrates a newly developed parylene buckled-type valve with the same working principle of the “buckled straw”. Such a new design of the valve uses the buckled region of plastic tubes as the on/off switch for flow control, and there is no need of adding deformable diaphragms or sealing...