Resistive switching properties and conduction mechanisms of LaSmOx thin film by RF sputtering for RRAM applications - Chu, Yu-Tseng; Tsai, Meng-Hung; Huang, Cheng-Liang (Materials science & engineering. B, Solid-state materials for advanced technology, 2021)
Keywords: Annealing; Densification; Film thickness; LaSmOx; Polycrystalline; Post metal annealing; RF sputtering; RRAM; Sputtering; Switching; Thin films; Polycrystalline; RF sputtering; RRAM; LaSmOx; Post metal annealing