Determination of the transfer function for optical surface topography measuring instruments-a review
A significant number of areal surface topography measuring instruments, largely based on optical techniques, are commercially available. However, implementation of optical instrumentation into production is currently difficult due to the lack of understanding of the complex interaction between the l...
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| Published in | Measurement science & technology Vol. 24; no. 5; pp. 52001 - 1-18 |
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| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
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IOP Publishing
01.05.2013
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A significant number of areal surface topography measuring instruments, largely based on optical techniques, are commercially available. However, implementation of optical instrumentation into production is currently difficult due to the lack of understanding of the complex interaction between the light and the component surface. Studying the optical transfer function of the instrument can help address this issue. Here a review is given of techniques for the measurement of optical transfer functions. Starting from the basis of a spatially coherent, monochromatic confocal scanning imaging system, the theory of optical transfer functions in three-dimensional (3D) imaging is presented. Further generalizations are reviewed allowing the extension of the theory to the description of conventional and interferometric 3D imaging systems. Polychromatic transfer functions and surface topography measurements are also discussed. Following presentation of theoretical results, experimental methods to measure the optical transfer function of each class of system are presented, with a focus on suitable methods for the establishment of calibration standards in 3D imaging and surface topography measurements. |
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| AbstractList | A significant number of areal surface topography measuring instruments, largely based on optical techniques, are commercially available. However, implementation of optical instrumentation into production is currently difficult due to the lack of understanding of the complex interaction between the light and the component surface. Studying the optical transfer function of the instrument can help address this issue. Here a review is given of techniques for the measurement of optical transfer functions. Starting from the basis of a spatially coherent, monochromatic confocal scanning imaging system, the theory of optical transfer functions in three-dimensional (3D) imaging is presented. Further generalizations are reviewed allowing the extension of the theory to the description of conventional and interferometric 3D imaging systems. Polychromatic transfer functions and surface topography measurements are also discussed. Following presentation of theoretical results, experimental methods to measure the optical transfer function of each class of system are presented, with a focus on suitable methods for the establishment of calibration standards in 3D imaging and surface topography measurements. |
| Author | Coupland, Jeremy M Giusca, Claudiu L Foreman, Matthew R Török, Peter Leach, Richard K |
| Author_xml | – sequence: 1 givenname: Matthew R surname: Foreman fullname: Foreman, Matthew R email: matthew.foreman@imperial.ac.uk organization: National Physical Laboratory Engineering Measurement Division, Hampton Road, Teddington, Middlesex TW11 0LW, UK – sequence: 2 givenname: Claudiu L surname: Giusca fullname: Giusca, Claudiu L organization: National Physical Laboratory Engineering Measurement Division, Hampton Road, Teddington, Middlesex TW11 0LW, UK – sequence: 3 givenname: Jeremy M surname: Coupland fullname: Coupland, Jeremy M organization: University of Loughborough Wolfson School of Mechanical and Manufacturing Engineering, Leicestershire, LE11 3TU, UK – sequence: 4 givenname: Peter surname: Török fullname: Török, Peter organization: Imperial College London Blackett Laboratory, Department of Physics, Prince Consort Road, London, SW7 2BZ, UK – sequence: 5 givenname: Richard K surname: Leach fullname: Leach, Richard K email: richard.leach@npl.co.uk organization: National Physical Laboratory Engineering Measurement Division, Hampton Road, Teddington, Middlesex TW11 0LW, UK |
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| Snippet | A significant number of areal surface topography measuring instruments, largely based on optical techniques, are commercially available. However,... |
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| SubjectTerms | areal surface topography Calibration Imaging linear theory Measuring instruments optical instruments Optical transfer function point spread function Three dimensional Topography Transfer functions |
| Title | Determination of the transfer function for optical surface topography measuring instruments-a review |
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