Photolithographic fabrication of graphene-based all-solid-state planar on-chip microsupercapacitors with ultrahigh power characteristics
The fabrication of all-solid-state planar on-chip microsupercapacitors with ultrahigh power characteristics was demonstrated by reduced graphene oxide and photolithography technology. In this paper, an ultrathin reduced graphene oxide film with a thickness of 8 nm was prepared by a modified spin coa...
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| Published in | Journal of applied physics Vol. 126; no. 16 |
|---|---|
| Main Authors | , , , , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Melville
American Institute of Physics
28.10.2019
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| Abstract | The fabrication of all-solid-state planar on-chip microsupercapacitors with ultrahigh power characteristics was demonstrated by reduced graphene oxide and photolithography technology. In this paper, an ultrathin reduced graphene oxide film with a thickness of 8 nm was prepared by a modified spin coating method that makes the microsupercapacitors have higher power characteristics which appear in high conductivity and fast charge and discharge rates. The electrodes, with a width of 150 μm, are narrower than existing electrodes in the field and fabricated by photolithography. In terms of performance, these microsupercapacitors have an extremely short time constant which is 0.03 ms, a high power density which is 17.94 W cm−3, and an excellent cycle stability with a capacitance retention of 94.6% after 10 000 cycles. |
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| AbstractList | The fabrication of all-solid-state planar on-chip microsupercapacitors with ultrahigh power characteristics was demonstrated by reduced graphene oxide and photolithography technology. In this paper, an ultrathin reduced graphene oxide film with a thickness of 8 nm was prepared by a modified spin coating method that makes the microsupercapacitors have higher power characteristics which appear in high conductivity and fast charge and discharge rates. The electrodes, with a width of 150 μm, are narrower than existing electrodes in the field and fabricated by photolithography. In terms of performance, these microsupercapacitors have an extremely short time constant which is 0.03 ms, a high power density which is 17.94 W cm−3, and an excellent cycle stability with a capacitance retention of 94.6% after 10 000 cycles. |
| Author | Zhang, Guangyu Liu, Chunfeng Zhang, Ludi Liu, Fangshuo Zhao, Wenqiang Wu, Fengmin Liu, Linjing Wang, Shu Li, Xiang |
| Author_xml | – sequence: 1 givenname: Ludi surname: Zhang fullname: Zhang, Ludi organization: School of Science, Harbin University of Science and Technology, Harbin 150080, China – sequence: 2 givenname: Linjing surname: Liu fullname: Liu, Linjing organization: School of Science, Harbin University of Science and Technology, Harbin 150080, China – sequence: 3 givenname: Chunfeng surname: Liu fullname: Liu, Chunfeng organization: School of Science, Harbin University of Science and Technology, Harbin 150080, China – sequence: 4 givenname: Xiang surname: Li fullname: Li, Xiang organization: School of Science, Harbin University of Science and Technology, Harbin 150080, China – sequence: 5 givenname: Fangshuo surname: Liu fullname: Liu, Fangshuo organization: School of Science, Harbin University of Science and Technology, Harbin 150080, China – sequence: 6 givenname: Wenqiang surname: Zhao fullname: Zhao, Wenqiang organization: School of Science, Harbin University of Science and Technology, Harbin 150080, China – sequence: 7 givenname: Shu surname: Wang fullname: Wang, Shu organization: School of Science, Harbin University of Science and Technology, Harbin 150080, China – sequence: 8 givenname: Fengmin surname: Wu fullname: Wu, Fengmin organization: School of Science, Harbin University of Science and Technology, Harbin 150080, China – sequence: 9 givenname: Guangyu surname: Zhang fullname: Zhang, Guangyu organization: School of Science, Harbin University of Science and Technology, Harbin 150080, China |
| BookMark | eNp9kMtKAzEYhYMoWC8L3yDgSiE2l2Yys5TiDQRduB_-ZpJOZDqJSWrxDXxsx9YLqLgK_HznC-fsoe3e9wahI0bPGC3EmJ1JRquiYltoxGhZESUl3UYjSjkjZaWqXbSX0iOljJWiGqHX-9Zn37nc-nmE0DqNLcyi05Cd77G3eH02vSEzSKbB0HUkDYGGpAzZ4NBBDxH7nujWBbxwOvq0DCZqCKBd9jHh1aDHyy5HaN28xcGvTMS6hQg6m-hSdjodoB0LXTKHH-8-eri8eJhek9u7q5vp-S3RgqtMZlo2Zia5VKWGCZWGCS6MLC23mho5KQxXEy2aolK2YHKiaKmZLQsLvCipFvvoeKMN0T8tTcr1o1_Gfvix5oJRpSrB5UCdbKj3MikaW4foFhBfakbr951rVn_sPLDjH-zQer3e0Nd1fyZON4n0SX7pn338BuvQ2P_g3-Y3MOyghQ |
| CODEN | JAPIAU |
| CitedBy_id | crossref_primary_10_1016_j_mtchem_2021_100480 crossref_primary_10_1080_10584587_2022_2065576 crossref_primary_10_1088_2515_7655_ac01c0 crossref_primary_10_1080_00150193_2022_2092016 crossref_primary_10_1039_D4TA02916J crossref_primary_10_1007_s11706_022_0597_5 crossref_primary_10_1016_j_materresbull_2020_110977 crossref_primary_10_1016_j_est_2025_115862 crossref_primary_10_1002_smll_202006827 crossref_primary_10_1021_acsaem_1c03745 crossref_primary_10_1063_5_0104971 crossref_primary_10_1080_00150193_2024_2324691 crossref_primary_10_1080_10584587_2024_2327926 crossref_primary_10_1109_TED_2021_3105373 crossref_primary_10_1002_pssb_202000354 crossref_primary_10_1007_s12274_020_2729_5 crossref_primary_10_1063_5_0186302 |
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| ContentType | Journal Article |
| Copyright | Author(s) 2019 Author(s). Published under license by AIP Publishing. |
| Copyright_xml | – notice: Author(s) – notice: 2019 Author(s). Published under license by AIP Publishing. |
| DBID | AAYXX CITATION 8FD H8D L7M |
| DOI | 10.1063/1.5109691 |
| DatabaseName | CrossRef Technology Research Database Aerospace Database Advanced Technologies Database with Aerospace |
| DatabaseTitle | CrossRef Technology Research Database Aerospace Database Advanced Technologies Database with Aerospace |
| DatabaseTitleList | Technology Research Database CrossRef |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Physics |
| EISSN | 1089-7550 |
| ExternalDocumentID | 10_1063_1_5109691 jap |
| GrantInformation_xml | – fundername: the Natural Science Foundation of Heilongjiang Province grantid: E2018042,E2018049 – fundername: the National Natural Science Foundation of China (NNSFC) grantid: 51402075 |
| GroupedDBID | -DZ -~X .DC 1UP 2-P 29J 4.4 53G 5GY 5VS 85S AAAAW AABDS AAEUA AAIKC AAMNW AAPUP AAYIH ABFTF ABJNI ABZEH ACBEA ACBRY ACGFO ACGFS ACLYJ ACNCT ACZLF ADCTM AEGXH AEJMO AENEX AFATG AFHCQ AGKCL AGLKD AGMXG AGTJO AHSDT AIAGR AIDUJ AJJCW AJQPL ALEPV ALMA_UNASSIGNED_HOLDINGS AQWKA ATXIE AWQPM BPZLN CS3 D0L DU5 EBS EJD ESX F5P FDOHQ FFFMQ HAM M6X M71 M73 N9A NPSNA O-B P2P RIP RNS RQS RXW SC5 TAE TN5 TWZ UCJ UHB UPT WH7 XSW YQT YZZ ZCA ~02 AAGWI AAYXX ABJGX ADMLS BDMKI CITATION 8FD H8D L7M |
| ID | FETCH-LOGICAL-c327t-bc5deb52578ca405e1323e58f2fc0e546e274c3d697f6154708c1f86fa2680c3 |
| ISSN | 0021-8979 |
| IngestDate | Mon Jun 30 02:31:23 EDT 2025 Tue Jul 01 02:01:13 EDT 2025 Thu Apr 24 23:02:58 EDT 2025 Fri Jun 21 00:14:36 EDT 2024 Wed Nov 11 00:05:00 EST 2020 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 16 |
| Language | English |
| License | Published under license by AIP Publishing. 0021-8979/2019/126(16)/164308/6/$30.00 |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c327t-bc5deb52578ca405e1323e58f2fc0e546e274c3d697f6154708c1f86fa2680c3 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 |
| ORCID | 0000-0002-7579-1383 |
| PQID | 2310779325 |
| PQPubID | 2050677 |
| PageCount | 6 |
| ParticipantIDs | proquest_journals_2310779325 crossref_primary_10_1063_1_5109691 crossref_citationtrail_10_1063_1_5109691 scitation_primary_10_1063_1_5109691 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 20191028 2019-10-28 |
| PublicationDateYYYYMMDD | 2019-10-28 |
| PublicationDate_xml | – month: 10 year: 2019 text: 20191028 day: 28 |
| PublicationDecade | 2010 |
| PublicationPlace | Melville |
| PublicationPlace_xml | – name: Melville |
| PublicationTitle | Journal of applied physics |
| PublicationYear | 2019 |
| Publisher | American Institute of Physics |
| Publisher_xml | – name: American Institute of Physics |
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| SSID | ssj0011839 |
| Score | 2.4141371 |
| Snippet | The fabrication of all-solid-state planar on-chip microsupercapacitors with ultrahigh power characteristics was demonstrated by reduced graphene oxide and... |
| SourceID | proquest crossref scitation |
| SourceType | Aggregation Database Enrichment Source Index Database Publisher |
| SubjectTerms | Applied physics Electrodes Graphene Oxide coatings Photolithography Solid state Spin coating Thickness Time constant |
| Title | Photolithographic fabrication of graphene-based all-solid-state planar on-chip microsupercapacitors with ultrahigh power characteristics |
| URI | http://dx.doi.org/10.1063/1.5109691 https://www.proquest.com/docview/2310779325 |
| Volume | 126 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1bb9MwFLbKJgQ8IBggCgNZwANS5a652c7jBJsm1I1JdFLfIsexWVFJqy7hgV-AxJ_mnDhJ01Em4CWqjizX8vlybjkXQt6kIVcejywTxnIW8kyz1LceA3YLa7mR0qKjeHrGTy7CD9No2uv97GQtlUU61N-31pX8D1eBBnzFKtl_4Gy7KRDgN_AXnsBheP4Vj88vFwXmr126vtMzPbAqXdVRODQDKzJIM4bKKhuo-ZzBiWYZq-qIcIR0rlaDRc405mx9xeS8q3JpVhpUqJ5Vg3iqQG05L0AogR8_WOJUNSwX7rZ5_oOFq2oL10VPWuO9ilEPxmU2a7OBZiUGB740atSRXDZAmVvTJSN1Cpj-3I1XeDEK-rr-e10ioPLNZIjzzkGaKgOPydgNmhkaJ5xHMmYico1qW-ntCu4bmPKtagHsMIxQDEEAxdxNB9tsvX32MTm-GI-TydF0covs-uBzgNDcPXx_Ov7UfpRCY9JlDLmjNY2qeHDQbr1p3qx9ljtg0Ljcio75MnlA7tdcoYcORA9Jz-R75F6nG-UeuV1fzyPy4zdg0Q6w6MLSTWDRa8CiDli0BhbdBiyKwKItsGgFLHoNWI_J5Pho8u6E1SM7mA58UbBUR5lJscOu1Ap8AeMFfmAiaX2rRyYKufFFqIOMx8KCLR2KkdSeldwqn8uRDp6QnXyRm6eExpGfWnQWQqFCbUScCqmwAaGM8OO_6pO3zUUnzdXiVJV5UqVV8CDxkponffKqXbp0PVy2LdpvuJXUr_hVgs6PAA3mR33yuuXgTZtsWfVtsVqvSJaZfXbzXz0nd9fvzT7ZKValeQGWb5G-rBH5C5vGuJM |
| linkProvider | EBSCOhost |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Photolithographic+fabrication+of+graphene-based+all-solid-state+planar+on-chip+microsupercapacitors+with+ultrahigh+power+characteristics&rft.jtitle=Journal+of+applied+physics&rft.au=Zhang+Ludi&rft.au=Liu+Linjing&rft.au=Liu%2C+Chunfeng&rft.au=Li%2C+Xiang&rft.date=2019-10-28&rft.pub=American+Institute+of+Physics&rft.issn=0021-8979&rft.eissn=1089-7550&rft.volume=126&rft.issue=16&rft_id=info:doi/10.1063%2F1.5109691&rft.externalDBID=NO_FULL_TEXT |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0021-8979&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0021-8979&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0021-8979&client=summon |