What is the Young's Modulus of Silicon?
The Young's modulus ( E ) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in microelectromechanical systems (MEMS), is an anisotropic crystalline material whose material properties depend on orientation relative to the crystal la...
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| Published in | Journal of microelectromechanical systems Vol. 19; no. 2; pp. 229 - 238 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
New York
IEEE
01.04.2010
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subjects | |
| Online Access | Get full text |
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| Abstract | The Young's modulus ( E ) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in microelectromechanical systems (MEMS), is an anisotropic crystalline material whose material properties depend on orientation relative to the crystal lattice. This fact means that the correct value of E for analyzing two different designs in silicon may differ by up to 45%. However, perhaps, because of the perceived complexity of the subject, many researchers oversimplify silicon elastic behavior and use inaccurate values for design and analysis. This paper presents the best known elasticity data for silicon, both in depth and in a summary form, so that it may be readily accessible to MEMS designers. |
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| AbstractList | The Young's modulus (E) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in microelectromechanical systems (MEMS), is an anisotropic crystalline material whose material properties depend on orientation relative to the crystal lattice. This fact means that the correct value of E for analyzing two different designs in silicon may differ by up to 45%. However, perhaps, because of the perceived complexity of the subject, many researchers oversimplify silicon elastic behavior and use inaccurate values for design and analysis. This paper presents the best known elasticity data for silicon, both in depth and in a summary form, so that it may be readily accessible to MEMS designers.hfill[2009-0054] The Young's modulus ( E ) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in microelectromechanical systems (MEMS), is an anisotropic crystalline material whose material properties depend on orientation relative to the crystal lattice. This fact means that the correct value of E for analyzing two different designs in silicon may differ by up to 45%. However, perhaps, because of the perceived complexity of the subject, many researchers oversimplify silicon elastic behavior and use inaccurate values for design and analysis. This paper presents the best known elasticity data for silicon, both in depth and in a summary form, so that it may be readily accessible to MEMS designers. The Young's modulus [Formula Omitted] of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in microelectromechanical systems (MEMS), is an anisotropic crystalline material whose material properties depend on orientation relative to the crystal lattice. This fact means that the correct value of [Formula Omitted] for analyzing two different designs in silicon may differ by up to 45%. However, perhaps, because of the perceived complexity of the subject, many researchers oversimplify silicon elastic behavior and use inaccurate values for design and analysis. This paper presents the best known elasticity data for silicon, both in depth and in a summary form, so that it may be readily accessible to MEMS designers.[Formula Omitted][2009-0054] |
| Author | Kenny, T.W. Hopcroft, M.A. Nix, W.D. |
| Author_xml | – sequence: 1 givenname: M.A. surname: Hopcroft fullname: Hopcroft, M.A. organization: Dept. of Mech. Eng., Univ. of California at Berkeley, Berkeley, CA, USA – sequence: 2 givenname: W.D. surname: Nix fullname: Nix, W.D. organization: Dept. of Mater. Sci. & Eng., Stanford Univ., Stanford, CA, USA – sequence: 3 givenname: T.W. surname: Kenny fullname: Kenny, T.W. organization: Dept. of Mech. Eng., Stanford Univ., Stanford, CA, USA |
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crossref_primary_10_1038_s41378_023_00527_x crossref_primary_10_1007_s00542_020_05013_2 crossref_primary_10_1016_j_compstruct_2020_112964 crossref_primary_10_1088_1361_6641_ab7c7b crossref_primary_10_1116_6_0002190 crossref_primary_10_1016_j_apmt_2020_100753 crossref_primary_10_1016_j_compscitech_2015_04_019 crossref_primary_10_1109_JMEMS_2010_2082503 crossref_primary_10_1088_1361_6641_aa8b03 crossref_primary_10_1016_j_mee_2018_09_003 crossref_primary_10_1109_TED_2013_2295463 crossref_primary_10_1364_AO_57_003629 crossref_primary_10_1016_j_ultramic_2016_11_004 crossref_primary_10_1007_s11837_025_07218_0 crossref_primary_10_1088_0022_3727_49_25_255301 crossref_primary_10_1088_0960_1317_26_3_035002 crossref_primary_10_1063_1_4895999 crossref_primary_10_15407_nnn_17_03_529 crossref_primary_10_1016_j_bios_2021_113592 crossref_primary_10_1016_j_ceramint_2021_01_160 crossref_primary_10_1103_PhysRevB_92_125438 crossref_primary_10_1063_1_5027507 crossref_primary_10_1109_TSM_2014_2316917 crossref_primary_10_1007_s12039_019_1666_x crossref_primary_10_1016_j_optcom_2025_131495 crossref_primary_10_1364_OE_459562 crossref_primary_10_1016_j_mssp_2024_109226 crossref_primary_10_3390_chemosensors9080207 crossref_primary_10_1088_0960_1317_25_4_045016 crossref_primary_10_1016_j_physe_2021_114637 crossref_primary_10_1016_j_ijmecsci_2020_105527 crossref_primary_10_35848_1347_4065_abe99a crossref_primary_10_1002_batt_202300032 crossref_primary_10_1116_1_4900420 crossref_primary_10_1016_j_mee_2015_12_011 crossref_primary_10_1109_JMEMS_2013_2262585 crossref_primary_10_1088_0960_1317_24_6_065002 crossref_primary_10_1016_j_jpowsour_2013_04_103 crossref_primary_10_1016_j_measurement_2021_109965 crossref_primary_10_1016_j_jcis_2022_10_081 crossref_primary_10_1109_TCAD_2012_2188400 crossref_primary_10_1007_s11249_014_0346_8 crossref_primary_10_1016_j_ultras_2023_107082 crossref_primary_10_1021_acsami_3c04912 crossref_primary_10_1007_s44258_024_00028_0 crossref_primary_10_1134_S1063774514030031 crossref_primary_10_1039_C5NR04156B crossref_primary_10_1039_D4CS00001C crossref_primary_10_1063_1_3555441 crossref_primary_10_1364_OE_21_020911 crossref_primary_10_1557_jmr_2019_183 crossref_primary_10_1002_adem_201900663 crossref_primary_10_1021_acs_jpcc_7b04182 crossref_primary_10_1103_PhysRevMaterials_4_025601 crossref_primary_10_1103_PhysRevApplied_7_054026 crossref_primary_10_1109_JSTQE_2016_2635518 crossref_primary_10_1103_PhysRevB_109_075427 crossref_primary_10_1002_admi_201700529 crossref_primary_10_1038_nnano_2012_40 crossref_primary_10_1088_0960_1317_24_6_065016 crossref_primary_10_1007_s40544_020_0481_1 crossref_primary_10_1149_2_0851410jes crossref_primary_10_3390_mi14091725 crossref_primary_10_1088_1361_6439_ab062a crossref_primary_10_1016_j_surfcoat_2020_126300 crossref_primary_10_1007_s00339_022_05334_1 crossref_primary_10_1007_s11661_014_2715_1 crossref_primary_10_1007_s11220_020_00329_9 crossref_primary_10_1016_j_triboint_2012_11_011 crossref_primary_10_1007_s00542_014_2215_7 crossref_primary_10_1016_j_matpr_2019_05_303 crossref_primary_10_4071_isom_2017_TP13_051 crossref_primary_10_1103_PhysRevB_92_241202 crossref_primary_10_1016_j_ijnonlinmec_2019_07_002 crossref_primary_10_4028_www_scientific_net_AMR_797_561 crossref_primary_10_4236_msce_2021_98004 crossref_primary_10_1002_adfm_202312699 crossref_primary_10_1109_JSEN_2015_2486044 crossref_primary_10_1002_adts_201800097 crossref_primary_10_1109_TCPMT_2021_3095670 crossref_primary_10_1016_j_jsv_2023_117777 crossref_primary_10_1016_j_ijmecsci_2022_107482 crossref_primary_10_1016_j_optlastec_2022_107938 crossref_primary_10_1016_j_solmat_2022_111590 crossref_primary_10_1088_0022_3727_47_32_325301 crossref_primary_10_3390_s24196428 crossref_primary_10_1016_j_egypro_2015_07_049 crossref_primary_10_1016_j_euromechsol_2023_105050 crossref_primary_10_1080_15599612_2024_2371289 crossref_primary_10_1109_TCPMT_2021_3063854 crossref_primary_10_1109_TUFFC_2020_3037320 crossref_primary_10_1016_j_tsf_2019_04_045 crossref_primary_10_1063_1_4914031 crossref_primary_10_1002_nme_5127 crossref_primary_10_1016_j_sna_2012_05_014 crossref_primary_10_1016_j_sse_2020_107918 crossref_primary_10_1109_TCPMT_2024_3391231 crossref_primary_10_1016_j_mssp_2015_12_020 crossref_primary_10_3390_ma14071780 crossref_primary_10_1016_j_jeurceramsoc_2019_02_001 crossref_primary_10_1063_5_0211557 crossref_primary_10_1364_OE_21_016882 crossref_primary_10_1016_j_ijengsci_2018_05_001 crossref_primary_10_1016_j_optmat_2017_03_014 crossref_primary_10_3390_mi14051022 crossref_primary_10_1016_j_cap_2014_03_025 crossref_primary_10_1063_1_5115480 crossref_primary_10_1364_OME_532770 crossref_primary_10_1016_j_scriptamat_2022_115064 crossref_primary_10_1038_s41598_022_23973_5 crossref_primary_10_1063_1_4893375 crossref_primary_10_3390_mi14091722 crossref_primary_10_1109_TUFFC_2019_2892227 crossref_primary_10_1016_j_mssp_2024_108579 crossref_primary_10_1103_PhysRevA_96_063834 crossref_primary_10_1007_s00542_018_3956_5 crossref_primary_10_1109_JMEMS_2013_2273439 crossref_primary_10_1039_C8LC00833G crossref_primary_10_1063_1_4904478 crossref_primary_10_1016_j_sna_2018_12_045 crossref_primary_10_1109_JSEN_2023_3255415 crossref_primary_10_1002_app_48869 crossref_primary_10_1021_acs_jpcc_6b13028 crossref_primary_10_1109_TMAG_2018_2856895 crossref_primary_10_1016_j_jmst_2022_12_050 crossref_primary_10_1103_PhysRevMaterials_6_110201 crossref_primary_10_1016_j_jbiomech_2023_111440 crossref_primary_10_1109_TCAD_2013_2237770 crossref_primary_10_3390_s18082603 crossref_primary_10_1109_JMEMS_2020_3012109 crossref_primary_10_2320_matertrans_M2014207 crossref_primary_10_1039_C4RA06809B crossref_primary_10_1021_acs_chemrev_3c00139 crossref_primary_10_1016_j_sna_2012_05_033 crossref_primary_10_1063_1_4971249 crossref_primary_10_1088_2631_8695_ab407e crossref_primary_10_1063_1_4904468 crossref_primary_10_1016_j_microrel_2016_09_015 crossref_primary_10_1088_1742_6596_1319_1_012008 crossref_primary_10_1002_adfm_202202779 crossref_primary_10_1016_j_elecom_2017_01_007 crossref_primary_10_4028_www_scientific_net_SSP_245_14 crossref_primary_10_1016_j_msea_2015_10_105 crossref_primary_10_1039_c3ra47452f crossref_primary_10_1109_JQE_2019_2907368 crossref_primary_10_3390_mi10020136 crossref_primary_10_1021_acsami_4c03166 crossref_primary_10_3390_surfaces8010002 crossref_primary_10_1063_1_4824759 crossref_primary_10_1016_j_molstruc_2016_04_061 crossref_primary_10_1016_j_sna_2022_113444 crossref_primary_10_1016_j_mtcomm_2020_101822 crossref_primary_10_1021_la3034676 crossref_primary_10_1088_2053_1591_aa55a4 crossref_primary_10_1109_JMEMS_2014_2349894 crossref_primary_10_1016_j_jmst_2023_08_050 crossref_primary_10_1088_2053_1591_ab1f01 crossref_primary_10_1016_j_cma_2017_10_021 crossref_primary_10_1039_C4RA02841D crossref_primary_10_1088_0960_1317_22_8_085015 crossref_primary_10_1063_5_0179369 crossref_primary_10_3390_mi12101191 crossref_primary_10_1063_1_4977871 crossref_primary_10_1016_j_eml_2016_01_004 crossref_primary_10_1002_advs_202201489 crossref_primary_10_3390_electronics11152451 crossref_primary_10_3390_mi16020114 crossref_primary_10_1016_j_ijsolstr_2016_02_031 crossref_primary_10_1038_s41467_024_54284_0 crossref_primary_10_1103_PhysRevApplied_5_034002 crossref_primary_10_1109_TDMR_2019_2956506 crossref_primary_10_1016_j_ceramint_2015_09_053 crossref_primary_10_1103_PhysRevB_92_144104 crossref_primary_10_3390_s18041037 crossref_primary_10_1109_JMEMS_2016_2587867 crossref_primary_10_1107_S1600577524006234 crossref_primary_10_1007_s00542_017_3442_5 crossref_primary_10_1016_j_sna_2015_02_021 crossref_primary_10_1016_j_microrel_2023_114973 crossref_primary_10_1109_JEDS_2023_3281866 crossref_primary_10_1016_j_microrel_2015_12_031 crossref_primary_10_1080_14786435_2017_1334135 crossref_primary_10_1021_acsami_7b13205 crossref_primary_10_1088_0960_1317_22_8_085007 crossref_primary_10_1109_JMEMS_2020_3022765 crossref_primary_10_1109_JMEMS_2016_2548485 crossref_primary_10_1109_TIM_2024_3470046 crossref_primary_10_1088_2058_8585_aca779 crossref_primary_10_1186_s12951_023_02049_0 crossref_primary_10_1063_5_0232435 crossref_primary_10_1103_PhysRevApplied_11_014014 crossref_primary_10_1016_j_tsf_2014_06_003 crossref_primary_10_1002_adfm_201200988 crossref_primary_10_1016_j_mejo_2016_07_007 crossref_primary_10_1038_srep09510 crossref_primary_10_1115_1_4036125 crossref_primary_10_1002_lpor_202400414 crossref_primary_10_1016_j_measurement_2017_07_052 crossref_primary_10_1088_1361_6439_aa654f crossref_primary_10_1016_j_ijnonlinmec_2019_103386 crossref_primary_10_1088_1361_665X_acb86d crossref_primary_10_1002_aelm_201900003 crossref_primary_10_3390_coatings13071277 crossref_primary_10_1007_s12031_021_01922_7 crossref_primary_10_1016_j_diamond_2021_108403 crossref_primary_10_1111_jace_17493 crossref_primary_10_1016_j_surfcoat_2022_128225 crossref_primary_10_3390_nano9050663 crossref_primary_10_1016_j_cap_2017_11_015 crossref_primary_10_1063_5_0123580 crossref_primary_10_1107_S1600577522009778 crossref_primary_10_1038_ncomms12764 crossref_primary_10_1038_s41598_018_37660_x crossref_primary_10_1002_pssa_201532671 crossref_primary_10_1016_j_ceramint_2018_12_183 crossref_primary_10_1109_TUFFC_2012_2290 crossref_primary_10_1098_rsta_2021_0009 crossref_primary_10_1016_j_triboint_2024_109764 crossref_primary_10_1117_1_OE_55_9_091409 crossref_primary_10_1109_TUFFC_2019_2893121 crossref_primary_10_1049_mnl_2013_0395 crossref_primary_10_1088_2053_1583_ac005e crossref_primary_10_1038_s41598_021_04693_8 crossref_primary_10_1016_j_measen_2021_100042 crossref_primary_10_1109_JMEMS_2020_3020568 crossref_primary_10_3390_s151129685 crossref_primary_10_1016_j_jallcom_2020_155765 crossref_primary_10_1016_j_solmat_2013_11_016 crossref_primary_10_1088_0957_4484_23_48_485708 crossref_primary_10_3390_nano12020265 crossref_primary_10_1016_j_optlastec_2021_107667 crossref_primary_10_1016_j_tsf_2014_06_027 crossref_primary_10_1016_j_microrel_2022_114690 crossref_primary_10_1063_1_4894843 crossref_primary_10_1109_JMEMS_2018_2825442 crossref_primary_10_1115_1_4039853 crossref_primary_10_1016_j_matdes_2017_06_052 crossref_primary_10_1016_j_forsciint_2015_12_041 crossref_primary_10_1016_j_mne_2024_100292 crossref_primary_10_1088_1361_6528_ab1f5f crossref_primary_10_1016_j_mtadv_2024_100489 crossref_primary_10_1063_1_5019269 crossref_primary_10_1016_j_eml_2021_101541 crossref_primary_10_1515_ijnsns_2015_0091 crossref_primary_10_1016_j_apsusc_2017_01_302 crossref_primary_10_1016_j_tws_2023_110738 crossref_primary_10_1109_JMEMS_2012_2227458 crossref_primary_10_1088_2058_8585_abc3ca crossref_primary_10_1016_j_micron_2015_08_003 crossref_primary_10_1116_6_0001283 crossref_primary_10_1016_j_ultramic_2023_113705 crossref_primary_10_1016_j_jmmm_2015_07_079 crossref_primary_10_3390_mi14010165 crossref_primary_10_1038_s41524_024_01425_0 crossref_primary_10_1109_JMEMS_2011_2167671 crossref_primary_10_1002_anie_201702739 crossref_primary_10_1088_1361_648X_ad649f crossref_primary_10_1016_j_compstruct_2015_12_062 crossref_primary_10_3390_mi13020164 crossref_primary_10_1016_j_optlastec_2022_108874 crossref_primary_10_1109_JMEMS_2013_2262593 crossref_primary_10_1109_JMEMS_2014_2347205 crossref_primary_10_1140_epjp_s13360_022_02655_1 crossref_primary_10_1016_j_actamat_2014_12_041 crossref_primary_10_1063_1_4994163 crossref_primary_10_1103_PhysRevB_99_245305 crossref_primary_10_3390_mi11070647 crossref_primary_10_1364_OPTICA_1_000414 crossref_primary_10_1088_1361_6439_ac521e crossref_primary_10_1016_j_ceramint_2018_03_235 crossref_primary_10_1007_s00466_014_1083_4 crossref_primary_10_1016_j_mseb_2022_115740 crossref_primary_10_1038_srep46083 crossref_primary_10_1016_j_microrel_2021_114129 crossref_primary_10_1063_1_4977852 crossref_primary_10_1088_0953_8984_28_49_495801 crossref_primary_10_1021_acsami_3c09552 crossref_primary_10_1016_j_apt_2013_09_009 crossref_primary_10_1109_TUFFC_2022_3156881 crossref_primary_10_1109_JMEMS_2020_3022557 crossref_primary_10_1063_1_4927152 crossref_primary_10_1007_s11340_014_9911_1 crossref_primary_10_1016_j_mtcomm_2023_105442 crossref_primary_10_1109_TVLSI_2017_2713124 crossref_primary_10_1103_PhysRevD_91_102002 crossref_primary_10_1007_s11071_021_06641_7 crossref_primary_10_1063_1_4861736 crossref_primary_10_1364_PRJ_539211 crossref_primary_10_1063_5_0011873 crossref_primary_10_1113_JP272983 crossref_primary_10_1116_6_0001269 crossref_primary_10_1103_PhysRevA_107_023525 crossref_primary_10_1103_PhysRevB_103_014117 crossref_primary_10_1016_j_pquantelec_2020_100315 crossref_primary_10_1038_s41560_023_01378_6 crossref_primary_10_1109_JMEMS_2012_2189367 crossref_primary_10_1109_TED_2017_2781264 crossref_primary_10_1063_1_4921862 crossref_primary_10_1007_s12633_015_9290_y crossref_primary_10_1016_j_snb_2014_05_076 crossref_primary_10_1016_j_ijimpeng_2017_11_010 crossref_primary_10_1016_j_ijnonlinmec_2021_103850 crossref_primary_10_1063_1_4972175 crossref_primary_10_1111_jace_19644 crossref_primary_10_3390_mi14112089 crossref_primary_10_3390_mca22040041 crossref_primary_10_1063_1_4909511 crossref_primary_10_1109_TED_2013_2295244 crossref_primary_10_1016_j_physb_2022_414599 crossref_primary_10_1016_j_wear_2016_11_029 crossref_primary_10_1038_s41378_019_0129_3 crossref_primary_10_1063_5_0019584 crossref_primary_10_1108_SSMT_11_2023_0066 crossref_primary_10_1007_s11249_015_0567_5 crossref_primary_10_3390_mi8080248 crossref_primary_10_1016_j_colsurfb_2022_112600 crossref_primary_10_1038_s42005_022_01119_3 crossref_primary_10_1007_s10854_016_4841_6 crossref_primary_10_1007_s11071_024_09505_y crossref_primary_10_1002_adhm_201901454 crossref_primary_10_1109_JMEMS_2021_3079442 crossref_primary_10_1109_TSM_2014_2329569 crossref_primary_10_1088_1361_6439_ada165 crossref_primary_10_1364_OE_23_028649 crossref_primary_10_1088_0960_1317_24_2_025002 crossref_primary_10_1557_adv_2019_337 crossref_primary_10_1088_2053_1583_2_2_021001 crossref_primary_10_1088_1741_2552_aa68f0 crossref_primary_10_1063_1_4941398 crossref_primary_10_1115_1_4064209 crossref_primary_10_1126_sciadv_adk6846 crossref_primary_10_1007_s00339_016_0508_7 crossref_primary_10_1088_0957_4484_24_18_185702 crossref_primary_10_1038_micronano_2016_27 crossref_primary_10_1002_smtd_202301232 crossref_primary_10_1038_s41598_019_52657_w crossref_primary_10_3390_mi12121511 crossref_primary_10_1149_2_0631711jes crossref_primary_10_1007_s11340_012_9693_2 crossref_primary_10_1063_1_5045736 crossref_primary_10_1109_JMEMS_2018_2823200 crossref_primary_10_3390_mi13101557 crossref_primary_10_1038_s41598_018_34673_4 crossref_primary_10_1016_j_tsf_2017_02_008 crossref_primary_10_1021_acs_langmuir_9b02103 crossref_primary_10_1007_s00707_015_1448_6 crossref_primary_10_1364_OE_545403 crossref_primary_10_1016_j_net_2024_103347 crossref_primary_10_1039_D0NR01003K crossref_primary_10_1088_0960_1317_21_11_115020 crossref_primary_10_1103_PhysRevD_98_102001 crossref_primary_10_1021_la3046719 crossref_primary_10_1016_j_mssp_2021_105981 crossref_primary_10_1007_s11012_014_9950_9 crossref_primary_10_7554_eLife_39640 crossref_primary_10_1134_S106378341904019X crossref_primary_10_1016_j_ijplas_2024_104032 crossref_primary_10_1109_TDMR_2012_2189401 crossref_primary_10_1016_j_matpr_2017_08_002 crossref_primary_10_1016_j_cap_2019_02_015 crossref_primary_10_1038_nphoton_2017_43 crossref_primary_10_1063_1_4930016 crossref_primary_10_1063_5_0128994 crossref_primary_10_1063_1_5042456 crossref_primary_10_1063_1_5006378 crossref_primary_10_3390_mi13122247 crossref_primary_10_1103_PhysRevB_95_064106 crossref_primary_10_1016_j_microrel_2020_113683 crossref_primary_10_1016_j_mssp_2024_108820 crossref_primary_10_1016_j_tsf_2019_137625 crossref_primary_10_1016_j_solener_2020_10_021 crossref_primary_10_1111_ijac_13679 crossref_primary_10_1016_j_matdes_2018_03_051 crossref_primary_10_1016_j_pedc_2022_100032 crossref_primary_10_1177_0309324715590957 crossref_primary_10_1016_j_ijsolstr_2024_112811 crossref_primary_10_1021_acsnano_7b05796 crossref_primary_10_1038_s41378_021_00265_y crossref_primary_10_1155_2018_7812743 crossref_primary_10_1016_j_compstruc_2012_10_020 crossref_primary_10_1016_j_engfracmech_2016_01_014 crossref_primary_10_1109_JSEN_2017_2777864 crossref_primary_10_1016_j_jsv_2021_116518 crossref_primary_10_1021_jp205676p crossref_primary_10_3390_mi11121071 crossref_primary_10_1088_1361_6463_abd8be crossref_primary_10_3390_mi10090626 crossref_primary_10_1016_j_mee_2017_11_015 crossref_primary_10_1016_j_etran_2024_100391 crossref_primary_10_1016_j_jddst_2021_102668 crossref_primary_10_1063_1_5042203 crossref_primary_10_1016_j_tsf_2017_11_007 crossref_primary_10_1016_j_mee_2015_01_024 crossref_primary_10_1063_1_4863542 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| Cites_doi | 10.1109/JMEMS.2008.924253 10.1063/1.1713863 10.1063/1.1702809 10.1143/JJAP.39.368 10.1007/b117574 10.1063/1.323747 10.1063/1.3148774 10.1088/0022-3727/19/3/014 10.1109/LED.2004.824840 10.1063/1.1313776 10.1063/1.329108 10.1063/1.1661935 10.1109/FREQ.1997.639192 10.1063/1.359201 10.1147/rd.54.0266 10.1109/84.896765 10.1103/PhysRev.134.A1387 10.1107/S0021889892005387 10.1063/1.1659498 10.1088/0022-3727/4/2/312 10.1109/PROC.1982.12331 10.1109/SENSOR.1995.721749 10.1103/PhysRev.161.756 10.1109/84.623107 10.1063/1.2753758 |
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| References | ref35 ref13 ref34 ref12 young (ref25) 1989 ref37 ref36 ref14 ref31 ref30 ref33 ref11 ref10 george (ref45) 1997; 20 nye (ref6) 1985 timoshenko (ref26) 1959 ref17 ref38 hopcroft (ref27) 2002 ref19 liu (ref1) 2006 bescond (ref15) 2002; 88 burenkov (ref40) 1974; 16 (ref8) 2002 hopcroft (ref39) 2007 shanker (ref23) 1978; 6 ref24 ref42 ref41 ref22 ref21 ref28 madou (ref2) 2001 (ref44) 2007 ref29 maluf (ref32) 2000 sharpe (ref18) 2002 ref9 ref4 li (ref20) 2002 gorman (ref43) 1975 mason (ref16) 1958 senturia (ref3) 2001 kelly (ref5) 1973 auld (ref7) 1990 |
| References_xml | – ident: ref41 doi: 10.1109/JMEMS.2008.924253 – year: 1973 ident: ref5 publication-title: Strong Solids – start-page: 427 year: 2002 ident: ref20 article-title: study on ultra-thin nems cantilevers - high yield fabrication and size-effect on young's modulus of silicon publication-title: Proc 15th IEEE Int Conf MEMS – year: 1990 ident: ref7 publication-title: Acoustic Fields and Waves in Solids – year: 2001 ident: ref2 publication-title: Fundamentals of Microfabrication – volume: 88 start-page: 50 year: 2002 ident: ref15 article-title: measurement by laser generated ultrasound of the stiffness tensor of an anisotropic material publication-title: Acustica United Acta Acustica – ident: ref9 doi: 10.1063/1.1713863 – ident: ref13 doi: 10.1063/1.1702809 – ident: ref37 doi: 10.1143/JJAP.39.368 – year: 2001 ident: ref3 publication-title: Microsystem Design doi: 10.1007/b117574 – year: 2000 ident: ref32 publication-title: An Introduction to Microelectromechanical Systems Engineering – ident: ref36 doi: 10.1063/1.323747 – ident: ref21 doi: 10.1063/1.3148774 – ident: ref35 doi: 10.1088/0022-3727/19/3/014 – year: 2002 ident: ref18 publication-title: The MEMS Handbook – ident: ref29 doi: 10.1109/LED.2004.824840 – ident: ref28 doi: 10.1063/1.1313776 – year: 2002 ident: ref8 publication-title: Specifications for Polished Monocrystalline Silicon Wafers – ident: ref24 doi: 10.1063/1.329108 – volume: 6 start-page: 62 year: 1978 ident: ref23 article-title: acoustical investigation in pure and doped n-type germanium and silicon publication-title: J Acoust Soc India – ident: ref17 doi: 10.1063/1.1661935 – year: 1959 ident: ref26 publication-title: Theory of Plates and Shells – ident: ref38 doi: 10.1109/FREQ.1997.639192 – ident: ref14 doi: 10.1063/1.359201 – year: 2007 ident: ref39 publication-title: Silicon micromechanical resonators for frequency references – year: 2006 ident: ref1 publication-title: Foundations of MEMS – ident: ref11 doi: 10.1147/rd.54.0266 – year: 2002 ident: ref27 publication-title: MAT-Test A new method for thin-film materials characterization – year: 1975 ident: ref43 publication-title: Free Vibration Analysis of Beams and Shafts – ident: ref19 doi: 10.1109/84.896765 – year: 1958 ident: ref16 publication-title: Physical Acoustics and the Properties of Solids – volume: 20 start-page: 98 year: 1997 ident: ref45 publication-title: EMIS Datareviews – ident: ref22 doi: 10.1103/PhysRev.134.A1387 – year: 1985 ident: ref6 publication-title: Physical Properties of Crystals Their representation by Tensors and Matrices – ident: ref30 doi: 10.1107/S0021889892005387 – ident: ref34 doi: 10.1063/1.1659498 – ident: ref10 doi: 10.1088/0022-3727/4/2/312 – ident: ref4 doi: 10.1109/PROC.1982.12331 – year: 2007 ident: ref44 publication-title: Comsol Multiphysics – ident: ref33 doi: 10.1109/SENSOR.1995.721749 – ident: ref12 doi: 10.1103/PhysRev.161.756 – volume: 16 start-page: 1496 year: 1974 ident: ref40 article-title: temperature dependence of the elastic constants of silicon publication-title: Fizika Tverdogo Tela (Soviet Physics Solid State) – year: 1989 ident: ref25 publication-title: Roark's Formulas for Stress and Strain – ident: ref31 doi: 10.1109/84.623107 – ident: ref42 doi: 10.1063/1.2753758 |
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| Snippet | The Young's modulus ( E ) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in... The Young's modulus [Formula Omitted] of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in... The Young's modulus (E) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in... |
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| SubjectTerms | Anisotropic magnetoresistance Crystal lattices Crystal structure Crystalline materials Crystallization Design engineering Elastic modulus Elasticity Lattices Material properties Mechanical engineering Microelectromechanical systems microelectromechanical systems (MEMS) design Micromechanical devices Modulus of elasticity Orientation Poisson's ratio shear modulus Silicon Young's modulus |
| Title | What is the Young's Modulus of Silicon? |
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