Simulation and experimental investigation of a novel electrostatic microgripper system - Hamedi, Mohsen; Salimi, Parisa; Vismeh, Milad (Microelectronic engineering, 2012)
Keywords: Applied sciences; Comb-drive actuators; Computer science; control theory; systems; Condensed matter: structure, mechanical and thermal properties; Control theory. Systems; Dielectric, amorphous and glass solid devices; Electronics; Electrostatic actuators; Exact sciences and technology; Mechanical and acoustical properties of condensed matter; Mechanical properties of nanoscale materials; Micro- and nanoelectromechanical devices (mems/nems); Microassembly; Microgripper; Physics; Robotics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Microgripper; Electrostatic actuators; Comb-drive actuators; Microassembly; Performance evaluation; Capacitive transducer; Microelectronics; Experimental study; Micromachine; Forecasting; Rotor; Finite element method; Operating rate; Gripper; Analytical method; Numerical simulation; Drive mechanism; Stiffness; Mathematical model; Capacitor; Microelectromechanical device; Handling