Moiré engineering in 2D heterostructures with process-induced strain

• Published in: Applied physics letters Vol. 122; no. 14
• Main Authors: Peña, Tara, Dey, Aditya, Chowdhury, Shoieb A., Azizimanesh, Ahmad, Hou, Wenhui, Sewaket, Arfan, Watson, Carla, Askari, Hesam, Wu, Stephen M.
• Format: Journal Article
• Language: English
• Published: Melville American Institute of Physics 03.04.2023
• Subjects: Applied physics; Bilayers; Broken symmetry; Density functional theory; Film thickness; First principles; Graphene; Heterostructures; Interference; Nanofabrication; Raman spectroscopy; Strain; Superlattices; Thin films

We report deterministic control over a moiré superlattice interference pattern in twisted bilayer graphene by implementing designable device-level heterostrain with process-induced strain engineering, a widely used technique in industrial silicon nanofabrication processes. By depositing stressed thi...