A 1-D Capacitive Micromachined Ultrasonic Transducer Imaging Array Fabricated With a Silicon-Nitride-Based Fusion Process

• Published in: IEEE/ASME transactions on mechatronics Vol. 16; no. 5; pp. 861 - 865
• Main Authors: Logan, A. S., Wong, L. L. P., Yeow, J. T. W.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.10.2011; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Arrays; Biomedical imaging; Capacitive micromachined ultrasonic transducer (CMUT); Imaging; Mechatronics; Membranes; Micromachining; Micromechanics; phased array; Phased arrays; Silicon; Silicon nitride; Transducers; Ultrasonic testing; Ultrasonic transducer arrays; Ultrasonic transducers; ultrasound

Capacitive micromachined ultrasonic transducers (CMUTs) are an alternative to the conventional method of generating ultrasound that increases bandwidths, simplifies fabrication, and facilitates the integration with necessary electronics. We report the fabrication, characterization, and initial-phase...