Rapid, non-destructive evaluation of ultrathin WSe2 using spectroscopic ellipsometry

• Published in: APL materials Vol. 2; no. 9; pp. 092508 - 092508-6
• Main Authors: Eichfeld, Sarah M., Eichfeld, Chad M., Lin, Yu-Chuan, Hossain, Lorraine, Robinson, Joshua A.
• Format: Journal Article
• Language: English
• Published: AIP Publishing LLC 01.09.2014

The utilization of tungsten diselenide (WSe2) in electronic and optoelectronic devices depends on the ability to understand and control the process-property relationship during synthesis. We demonstrate that spectroscopic ellipsometry is an excellent technique for accurate, non-destructive determina...