Advances in ion beam micromachining for complex 3D microfluidics

• Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Vol. 31; no. 6; pp. 6 - 12
• Main Authors: Ocola, Leonidas E., Palacios, Edgar
• Format: Journal Article
• Language: English
• Published: 01.11.2013
• Subjects: hydrofluoric acid; Silicon; Polydimethylsiloxane; Fluorescein

In this paper, the authors present microfluidic mixers containing complex curvilinear and several tens of microns deep three-dimensional (3D) geometries used to decrease mixing lengths in passive microfluidic systems. In order to create these 3D geometries, the authors use ion beam micromachining (I...