APA (7th ed.) Citation

Ocola, L. E., & Palacios, E. (2013). Advances in ion beam micromachining for complex 3D microfluidics. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 31(6), 6-12. https://doi.org/10.1116/1.4819302

Chicago Style (17th ed.) Citation

Ocola, Leonidas E., and Edgar Palacios. "Advances in Ion Beam Micromachining for Complex 3D Microfluidics." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 31, no. 6 (2013): 6-12. https://doi.org/10.1116/1.4819302.

MLA (9th ed.) Citation

Ocola, Leonidas E., and Edgar Palacios. "Advances in Ion Beam Micromachining for Complex 3D Microfluidics." Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 31, no. 6, 2013, pp. 6-12, https://doi.org/10.1116/1.4819302.