Fluid–structure coupling analysis and simulation of a micromachined piezo microjet

A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement respons...

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Published inSensors and actuators. A. Physical. Vol. 114; no. 2; pp. 460 - 465
Main Authors Liu, Changgeng, Cui, Tianhong, Zhou, Zhaoying, Lian, Kun, Goettert, Jost
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.09.2004
Subjects
Coupling analysis
Microjet
Micromachining
Simulation
Coupling analysis
Simulation
Microjet
Micromachining
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Summary:A piezoelectric microjet has been fabricated and its working mechanism has been investigated. Considering different physical effects, the coupling models of the device are established and the key characteristics of the microjet are simulated by finite-element method. The dynamic displacement responses of the transducer under liquid-loading and unloading are calculated and compared. From numerical results, the coupling interactions dramatically damp the vibration amplitude of the transducer. However, the effects on the resonant frequencies of the structure are negligible, which will save much calculation work during further design optimization of the device. Based on the optimal design rules, the device has been fabricated and characterized.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2003.11.019