Frequency response of AlN-based solidly mounted resonators under mechanical stress - Clement, M.; Delicado, A.; Olivares, J.; Mirea, T.; Sangrador, J.; Iborra, E. (Sensors and actuators. A. Physical., 2017)
Keywords: AlN resonator; Aluminum nitride; Bars; Deformation mechanisms; Frequency response; Frequency variation; Mechanical strain; Microcrystals; Piezoelectricity; Resonators; Sensors; Strain; Thin films; Viability; AlN resonator; Mechanical strain; Frequency variation