A low noise capacitive MEMS accelerometer with anti-spring structure

• Published in: Sensors and actuators. A. Physical. Vol. 296; pp. 79 - 86
• Main Authors: Zhang, Hongcai, Wei, Xueyong, Ding, Yanyu, Jiang, Zhuangde, Ren, Juan
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 01.09.2019; Elsevier BV
• Subjects: Accelerometers; Allan deviation; Anti-spring design; Background noise; Capacitive accelerometer; Converters; Frequency drift; Linearity; Low noise; Microelectromechanical systems; Noise sensitivity; Nonlinearity; Parameter estimation; Seismic application; Seismic design; Sensitivity analysis; Sensors; Thermal effect; Allan deviation; Thermal effect; Frequency drift; Low noise; Seismic application; Anti-spring design; Capacitive accelerometer

[Display omitted] •A low noise capacitive MEMS accelerometer is designed and characterized.•The sensitivity and non-linearity of fabricated MEMS accelerometer are respectively 53 fF/g, 0.03% by the sigma-delta modulator, while the CVC method is 3.78 mV/g with the non-linearity 0.04%.•The frequency d...