A low noise capacitive MEMS accelerometer with anti-spring structure
[Display omitted] •A low noise capacitive MEMS accelerometer is designed and characterized.•The sensitivity and non-linearity of fabricated MEMS accelerometer are respectively 53 fF/g, 0.03% by the sigma-delta modulator, while the CVC method is 3.78 mV/g with the non-linearity 0.04%.•The frequency d...
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Published in | Sensors and actuators. A. Physical. Vol. 296; pp. 79 - 86 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
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Lausanne
Elsevier B.V
01.09.2019
Elsevier BV |
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Abstract | [Display omitted]
•A low noise capacitive MEMS accelerometer is designed and characterized.•The sensitivity and non-linearity of fabricated MEMS accelerometer are respectively 53 fF/g, 0.03% by the sigma-delta modulator, while the CVC method is 3.78 mV/g with the non-linearity 0.04%.•The frequency dynamic range is 0–158 Hz with a sensitivity non-distortion of ±0.1 dB.
This work reports a capacitive MEMS accelerometer designed for seismic applications. The asymmetrical anti-spring structure is used and the device is microfabricated using SOI technology. Two capacitive readout methods, namely, capacitance-to-voltage-converter (CVC) and a commercial sigma-delta modulator, are introduced for comparison in the device characterization. For both methods, the accelerometer has a frequency dynamic range of 0-158 Hz. The sensitivity and non-linearity of the sensor is 53 fF/g (21.3 mV/g), 0.03% by the sigma-delta modulator, while the CVC method is 3.78 mV/g with the non-linearity 0.04%. As for the resolution, both methods have detected the lab's background noise of 11.5 μg/Hz at 0.03 Hz and have exhibited the resolution of the sensor is better than 10 μg/Hz. Regardless of the difference in parameter selection for the circuits, the CVC method has a much lower noise floor (51.8 ng/Hz at 1 Hz) than sigma-delta readout configuration (10 μg/Hz at 1 Hz). The proposed MEMS accelerometer based on anti-spring structures shows its high sensitivity and low noise performance, demonstrating its potential in seismic applications. |
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AbstractList | This work reports a capacitive MEMS accelerometer designed for seismic applications. The asymmetrical anti-spring structure is used and the device is microfabricated using SOI technology. Two capacitive readout methods, namely, capacitance-to-voltage-converter (CVC) and a commercial sigma-delta modulator, are introduced for comparison in the device characterization. For both methods, the accelerometer has a frequency dynamic range of 0-158 Hz. The sensitivity and non-linearity of the sensor is 53 fF/g (21.3 mV/g), 0.03% by the sigma-delta modulator, while the CVC method is 3.78 mV/g with the non-linearity 0.04%. As for the resolution, both methods have detected the lab's background noise of 11.5 μg/... at 0.03 Hz and have exhibited the resolution of the sensor is better than 10 μg/... Regardless of the difference in parameter selection for the circuits, the CVC method has a much lower noise floor (51.8 ng/... at 1 Hz) than sigma-delta readout configuration (10 μg/... at 1 Hz). The proposed MEMS accelerometer based on anti-spring structures shows its high sensitivity and low noise performance, demonstrating its potential in seismic applications.(ProQuest: ... denotes formulae omitted.) [Display omitted] •A low noise capacitive MEMS accelerometer is designed and characterized.•The sensitivity and non-linearity of fabricated MEMS accelerometer are respectively 53 fF/g, 0.03% by the sigma-delta modulator, while the CVC method is 3.78 mV/g with the non-linearity 0.04%.•The frequency dynamic range is 0–158 Hz with a sensitivity non-distortion of ±0.1 dB. This work reports a capacitive MEMS accelerometer designed for seismic applications. The asymmetrical anti-spring structure is used and the device is microfabricated using SOI technology. Two capacitive readout methods, namely, capacitance-to-voltage-converter (CVC) and a commercial sigma-delta modulator, are introduced for comparison in the device characterization. For both methods, the accelerometer has a frequency dynamic range of 0-158 Hz. The sensitivity and non-linearity of the sensor is 53 fF/g (21.3 mV/g), 0.03% by the sigma-delta modulator, while the CVC method is 3.78 mV/g with the non-linearity 0.04%. As for the resolution, both methods have detected the lab's background noise of 11.5 μg/Hz at 0.03 Hz and have exhibited the resolution of the sensor is better than 10 μg/Hz. Regardless of the difference in parameter selection for the circuits, the CVC method has a much lower noise floor (51.8 ng/Hz at 1 Hz) than sigma-delta readout configuration (10 μg/Hz at 1 Hz). The proposed MEMS accelerometer based on anti-spring structures shows its high sensitivity and low noise performance, demonstrating its potential in seismic applications. |
Author | Ding, Yanyu Jiang, Zhuangde Ren, Juan Zhang, Hongcai Wei, Xueyong |
Author_xml | – sequence: 1 givenname: Hongcai surname: Zhang fullname: Zhang, Hongcai organization: State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China – sequence: 2 givenname: Xueyong orcidid: 0000-0002-6443-4727 surname: Wei fullname: Wei, Xueyong email: seanwei@mail.xjtu.edu.cn organization: State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China – sequence: 3 givenname: Yanyu surname: Ding fullname: Ding, Yanyu organization: State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China – sequence: 4 givenname: Zhuangde surname: Jiang fullname: Jiang, Zhuangde organization: State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China – sequence: 5 givenname: Juan surname: Ren fullname: Ren, Juan email: juan.ren@chd.edu.cn organization: School of Construction Machinery, Chang’an University, Xi’an, China |
BookMark | eNp9kMtOwzAQRS1UJErhA9hZYp3gdxKxqkp5SK1YAGvLcSbgqHWK7bTi70lV1qxmc8_MnXOJJr73gNANJTklVN11efQmZ4RWOVE5kfQMTWlZ8IwTVU3QlFRMZIKJ4gJdxtgRQjgviil6mONNf8C-dxGwNTtjXXJ7wOvl-g0ba2EDod9CgoAPLn1h45PL4i44_4ljCoNNQ4ArdN6aTYTrvzlDH4_L98Vztnp9elnMV5nlTKasFrwoobGMSAElUaqhkpa1qgAE1MQUlVDQSFkybo1RrSw5rxsrjGxa4GD5DN2e9u5C_z1ATLrrh-DHk5pxwsT4tuRjip5SNvQxBmj1WHdrwo-mRB9l6U6PsvRRliZKj9TI3J8YGOvvHQQdrQNvoXEBbNJN7_6hfwGfu3Ok |
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ContentType | Journal Article |
Copyright | 2019 Copyright Elsevier BV Sep 1, 2019 |
Copyright_xml | – notice: 2019 – notice: Copyright Elsevier BV Sep 1, 2019 |
DBID | AAYXX CITATION 7TB 7U5 8FD FR3 L7M |
DOI | 10.1016/j.sna.2019.06.051 |
DatabaseName | CrossRef Mechanical & Transportation Engineering Abstracts Solid State and Superconductivity Abstracts Technology Research Database Engineering Research Database Advanced Technologies Database with Aerospace |
DatabaseTitle | CrossRef Solid State and Superconductivity Abstracts Engineering Research Database Technology Research Database Mechanical & Transportation Engineering Abstracts Advanced Technologies Database with Aerospace |
DatabaseTitleList | Solid State and Superconductivity Abstracts |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Engineering |
EISSN | 1873-3069 |
EndPage | 86 |
ExternalDocumentID | 10_1016_j_sna_2019_06_051 S0924424718321307 |
GroupedDBID | --K --M -~X .~1 0R~ 123 1B1 1RT 1~. 1~5 4.4 457 4G. 5VS 7-5 71M 8P~ 9JN AABNK AACTN AAEDT AAEDW AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AARLI AAXUO ABMAC ABNEU ABYKQ ACDAQ ACFVG ACGFS ACIWK ACRLP ADBBV ADECG ADEZE ADTZH AEBSH AECPX AEKER AFKWA AFTJW AFZHZ AGHFR AGUBO AGYEJ AHHHB AHJVU AIEXJ AIKHN AITUG AIVDX AJOXV AJSZI ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ AXJTR BJAXD BKOJK BLXMC CS3 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FIRID FLBIZ FNPLU FYGXN G-Q GBLVA IHE J1W JJJVA KOM LY7 M36 M41 MO0 N9A O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 RNS ROL RPZ SDF SDG SDP SES SPC SPCBC SPD SSK SSQ SST SSZ T5K TN5 YK3 ~G- AAQXK AAXKI AAYXX ABFNM ABXDB ACNNM ADMUD AFJKZ AJQLL ASPBG AVWKF AZFZN CITATION FEDTE FGOYB G-2 HMU HVGLF HZ~ R2- SCB SCH SET SEW WUQ 7TB 7U5 8FD FR3 L7M |
ID | FETCH-LOGICAL-c325t-b4378edc2054e8066d1518b69ee4eb0a7946ed55823caa6f5833bdc4a5dfe3ec3 |
IEDL.DBID | .~1 |
ISSN | 0924-4247 |
IngestDate | Fri Sep 13 03:28:19 EDT 2024 Thu Sep 26 16:35:23 EDT 2024 Fri Feb 23 02:21:06 EST 2024 |
IsPeerReviewed | true |
IsScholarly | true |
Keywords | Allan deviation Thermal effect Frequency drift Low noise Seismic application Anti-spring design Capacitive accelerometer |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-LOGICAL-c325t-b4378edc2054e8066d1518b69ee4eb0a7946ed55823caa6f5833bdc4a5dfe3ec3 |
ORCID | 0000-0002-6443-4727 |
PQID | 2302405153 |
PQPubID | 2045401 |
PageCount | 8 |
ParticipantIDs | proquest_journals_2302405153 crossref_primary_10_1016_j_sna_2019_06_051 elsevier_sciencedirect_doi_10_1016_j_sna_2019_06_051 |
PublicationCentury | 2000 |
PublicationDate | 2019-09-01 2019-09-00 20190901 |
PublicationDateYYYYMMDD | 2019-09-01 |
PublicationDate_xml | – month: 09 year: 2019 text: 2019-09-01 day: 01 |
PublicationDecade | 2010 |
PublicationPlace | Lausanne |
PublicationPlace_xml | – name: Lausanne |
PublicationTitle | Sensors and actuators. A. Physical. |
PublicationYear | 2019 |
Publisher | Elsevier B.V Elsevier BV |
Publisher_xml | – name: Elsevier B.V – name: Elsevier BV |
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SSID | ssj0003377 |
Score | 2.5477998 |
Snippet | [Display omitted]
•A low noise capacitive MEMS accelerometer is designed and characterized.•The sensitivity and non-linearity of fabricated MEMS accelerometer... This work reports a capacitive MEMS accelerometer designed for seismic applications. The asymmetrical anti-spring structure is used and the device is... |
SourceID | proquest crossref elsevier |
SourceType | Aggregation Database Publisher |
StartPage | 79 |
SubjectTerms | Accelerometers Allan deviation Anti-spring design Background noise Capacitive accelerometer Converters Frequency drift Linearity Low noise Microelectromechanical systems Noise sensitivity Nonlinearity Parameter estimation Seismic application Seismic design Sensitivity analysis Sensors Thermal effect |
Title | A low noise capacitive MEMS accelerometer with anti-spring structure |
URI | https://dx.doi.org/10.1016/j.sna.2019.06.051 https://www.proquest.com/docview/2302405153/abstract/ |
Volume | 296 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1NS8MwGA5jXvQgfuJ0jhw8CXFdk7bpccyNqWyXOdgt5OMtTKQbbuLN3-6bfuAH6MFjS1rKk_R53iTv-4SQqywIAWxqWWiEYUKnEdNBYpkDqaUEPxPy6x2TaTyei_tFtGiQQV0L49MqK-4vOb1g6-pOt0Kzu14uu7MApw4i9OTKQ2RiX1EuUIxwTN-8f6Z5cF6cvugbM9-63tkscrw2ubce6qWFhWfU-02bfrB0IT2jA7JfxYy0X37WIWlAfkT2vjgJHpPbPn1evdF8tdwAtSiAtsgJopPhZEa1tSgu3pcAQaR-5ZUinktW7snS0kL29QVOyHw0fByMWXVAArM8jLbMCJ5IcDbEuAskBg8O9VuaOAUQYALtzePBRZEMudU6znyFlXFW6MhlwMHyU9LMVzmcEQrSJT0HJnOJENhtMsO2EEujDWpbalrkuoZGrUsfDFUniD0pxFF5HJVPkot6LSJq8NS3zlTI03891q6BVtWftFE4RcKgA6Mufv6_t16QXX9V5oW1SRMxhUsMJLamU4yUDtnp3z2Mpx-4pcf5 |
link.rule.ids | 315,786,790,4521,24144,27957,27958,45620,45714 |
linkProvider | Elsevier |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3JTsMwEB1BOQAHxCp2fOCEZLWJ7cY5ViwqS3sBJG6Wl4lUhFJEQfw-4ywIkODANbGj6Dl588YePwMcF70U0eeep046Lm2uuO1lngfUVmuMmVCc7xiN-8N7efWgHubgtN0LE8sqG-6vOb1i6-ZKt0Gz-zyZdG97lDrINJKrSImJs3lYkCpLZAcWBpfXw_EnIQtRHcAY2_PYoV3crMq8ZmV0H0ryysVTJb-Fpx9EXUWfi1VYaWQjG9RvtgZzWK7D8hczwQ04G7Cn6Tsrp5MZMk8x0FdlQWx0Prpl1nuKL9GagHBkcfKVEaQTXi_LstpF9u0FN-H-4vzudMibMxK4F6l65U6KTGPwKUkv1KQfAoVw7fo5okTXs9E_HoNSOhXe2n4RN1m54KVVoUCBXmxBp5yWuA0MdciSgK4ImZQ0crqgttjXzjoKb7nbgZMWGvNcW2GYtkbs0RCOJuJoYp2cSnZAtuCZb-NpiKr_6rbfAm2an2lmKEsi3UHCS-z-76lHsDi8G92Ym8vx9R4sxTt1mdg-dAhfPCBd8eoOm-_mA7NCyq8 |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=A+low+noise+capacitive+MEMS+accelerometer+with+anti-spring+structure&rft.jtitle=Sensors+and+actuators.+A.+Physical.&rft.au=Zhang%2C+Hongcai&rft.au=Wei%2C+Xueyong&rft.au=Ding%2C+Yanyu&rft.au=Jiang%2C+Zhuangde&rft.date=2019-09-01&rft.pub=Elsevier+B.V&rft.issn=0924-4247&rft.eissn=1873-3069&rft.volume=296&rft.spage=79&rft.epage=86&rft_id=info:doi/10.1016%2Fj.sna.2019.06.051&rft.externalDocID=S0924424718321307 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0924-4247&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0924-4247&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0924-4247&client=summon |