The effect of electrical parameters of eddy current sensor on metal film thickness measurement performance and the optimization method

• Published in: Review of scientific instruments Vol. 94; no. 10
• Main Authors: Li, Hongkai, Wang, Jinlong, Zhang, Tong, Li, Zihan
• Format: Journal Article
• Language: English
• Published: Melville American Institute of Physics 01.10.2023
• Subjects: Alternating current; Capacitance; Circuits; Eddy currents; Film thickness; Optimization; Parameter sensitivity; Scientific apparatus & instruments; Sensors; Thickness measurement

Eddy current sensors have been widely used in the field of micro- and nano-measurements. The detection circuit is a key part of eddy current sensors. In particular, the electrical parameters in the signal conversion circuit have an important effect on the measurement performance. It is necessary to...