Recent advances in MEMS sensor technology-thermo-fluid and electro-magnetic devices

This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typica...

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Bibliographic Details
Published inIEEE instrumentation & measurement magazine Vol. 15; no. 3; pp. 16 - 20
Main Authors Khoshnoud, F., de Silva, C. W.
Format Magazine Article
LanguageEnglish
Published New York IEEE 01.06.2012
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects
Biomedical measurements
Detection
Devices
Harvesting
Instrumentation
Magnetic field measurement
Magnetomechanical effects
Micromechanical devices
Robot sensing systems
Sensors
Stress measurement
Temperature measurement
Tutorials
Online AccessGet full text
ISSN1094-6969
1941-0123
DOI10.1109/MIM.2012.6204868

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Summary:This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
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ISSN:1094-6969
1941-0123
DOI:10.1109/MIM.2012.6204868