Recent advances in MEMS sensor technology-thermo-fluid and electro-magnetic devices - Khoshnoud, F.; de Silva, C. W. (IEEE instrumentation & measurement magazine, 2012)
Keywords: Biomedical measurements; Detection; Devices; Harvesting; Instrumentation; Magnetic field measurement; Magnetomechanical effects; Micromechanical devices; Robot sensing systems; Sensors; Stress measurement; Temperature measurement; Tutorials