Ultra-high-Q thin-silicon nitride strip-loaded ring resonators

• Published in: Optics letters Vol. 40; no. 14; p. 3316
• Main Authors: Stefan, L, Bernard, M, Guider, R, Pucker, G, Pavesi, L, Ghulinyan, M
• Format: Journal Article
• Language: English
• Published: United States 15.07.2015

We report on the design, fabrication, and characterization of thin Si3N4 ultra-high-quality (UHQ) factor ring resonators monolithically integrated on a silicon chip. The devices are based on a strip-loaded configuration and operate at both near-infrared (NIR) and third-telecom wavelengths. This appr...