Study of the porous polycrystalline silicon formation process
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Published in | Semiconductor science and technology Vol. 19; no. 12; pp. 1343 - 1347 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
IOP Publishing
01.12.2004
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Online Access | Get full text |
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ISSN: | 0268-1242 1361-6641 |
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DOI: | 10.1088/0268-1242/19/12/002 |