Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded Activity Time Variation - Qiao, Yan; Wu, NaiQi; Zhou, MengChu (IEEE transactions on automation science and engineering, 2012)
Keywords: Algorithms; Applied sciences; Automation; Cluster tools; Computer science; control theory; systems; Control system analysis; Control theory. Systems; discrete event system; Discrete event systems; Electronics; Exact sciences and technology; Microelectronic fabrication (materials and surfaces technology); Petri net (PN); Petri nets; Real time; Real-time systems; Robots; Scheduling; Semiconductor device manufacture; Semiconductor device modeling; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; semiconductor manufacturing; Cluster tools; Minimization; Scheduling; Real time; Modeling; Microelectronic fabrication; Petri net (PN); Indirect method; Off line; semiconductor manufacturing; Tool management; Arm; Petri net; Discrete event system