Lithium Niobate Phononic Crystals for Tailoring Performance of RF Laterally Vibrating Devices

• Published in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control Vol. 65; no. 6; pp. 934 - 944
• Main Authors: Ruochen Lu, Manzaneque, Tomas, Yansong Yang, Songbin Gong
• Format: Journal Article
• Language: English
• Published: United States IEEE 01.06.2018
• Subjects: Acoustic band gap; Acoustic scattering; acoustic scattering parameters; Acoustic waves; Delay lines; laterally vibrating modes; Lithium niobate; microelectromechanical systems; phononic crystal (PnC); piezoelectricity; Reflection; Resonators

This paper reports the first demonstration of phononic crystals (PnCs) in suspended lithium niobate thin films, which exhibit band gaps for tailoring the performance of laterally vibrating devices. Transmission and reflection properties of lithium niobate PnCs for both shear-horizontal (SH0) and len...