An experimental study of megasonic cleaning of silicon wafers
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Published in | Journal of the Electrochemical Society Vol. 142; no. 8; pp. 2812 - 2817 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Pennington, NJ
Electrochemical Society
01.08.1995
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Subjects | |
Online Access | Get full text |
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