Evaluation of analysis volume in total reflection X‐ray fluorescence analysis

• Published in: X-ray spectrometry Vol. 52; no. 6; pp. 357 - 363
• Main Authors: Tsuji, Kouichi, Taniguchi, Naoya, Yamaguchi, Hiroki, Matsuyama, Tsugufumi
• Format: Journal Article
• Language: English
• Published: Bognor Regis Wiley Subscription Services, Inc 01.11.2023
• Subjects: Diameters; Evaporation; Fluorescence; Glass substrates; Sample preparation; Thin films; Vacuum evaporation

Total reflection X‐ray fluorescence (TXRF) is widely used for trace elemental analysis, wherein a thin monochromatic X‐ray beam is typically applied at glancing angles. The actual volume of the sample measured by the instrument (analysis volume) depends on the dimensions of the X‐ray beam and glanci...