Surface acoustic wave hydrogen sensors based on ZnO nanoparticles incorporated with a Pt catalyst
This paper describes the fabrication and characterization of surface acoustic wave (SAW) hydrogen sensors using ZnO nanoparticles incorporated with a Pt catalyst for hydrogen detection at room temperature. The Pt/ZnO nanoparticle sensing layer was deposited onto SAW delay line sensor-based interdigi...
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Published in | Sensors and actuators. B, Chemical Vol. 161; no. 1; pp. 341 - 348 |
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Main Authors | , |
Format | Journal Article |
Language | English |
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Elsevier B.V
2012
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Abstract | This paper describes the fabrication and characterization of surface acoustic wave (SAW) hydrogen sensors using ZnO nanoparticles incorporated with a Pt catalyst for hydrogen detection at room temperature. The Pt/ZnO nanoparticle sensing layer was deposited onto SAW delay line sensor-based interdigitated electrodes (IDTs)/aluminum nitride (AlN)/silicon (Si) structure. The average ZnO crystallite sizes varied from 30
nm to 40
nm and were synthesized by a sol–gel method and deposited onto SAW sensors by spin coating. The Pt-like catalyst was deposited onto ZnO nanoparticles by RF sputtering for 2
s. The effect of ZnO crystalline quality, crystallite size and humidity on hydrogen sensing performance was evaluated. Moreover, the sensitivity of SAW delay line sensors as they depend on conventional structures and layered structures were also characterized in this work. The SAW delay line sensors using AlN/Si structures have fundamental frequency of 129.28
MHz for uncoated, 128.85
MHz and 126.93
MHz for coated Pt/ZnO sensing layer corresponding to the conventional and layered structures, respectively. The layered SAW structure using Pt/ZnO nanoparticles as sensing layer show frequency shift of 55
kHz in 1% H
2 concentration at room temperature with good repeatability and stability. |
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AbstractList | This paper describes the fabrication and characterization of surface acoustic wave (SAW) hydrogen sensors using ZnO nanoparticles incorporated with a Pt catalyst for hydrogen detection at room temperature. The Pt/ZnO nanoparticle sensing layer was deposited onto SAW delay line sensor-based interdigitated electrodes (IDTs)/aluminum nitride (AlN)/silicon (Si) structure. The average ZnO crystallite sizes varied from 30
nm to 40
nm and were synthesized by a sol–gel method and deposited onto SAW sensors by spin coating. The Pt-like catalyst was deposited onto ZnO nanoparticles by RF sputtering for 2
s. The effect of ZnO crystalline quality, crystallite size and humidity on hydrogen sensing performance was evaluated. Moreover, the sensitivity of SAW delay line sensors as they depend on conventional structures and layered structures were also characterized in this work. The SAW delay line sensors using AlN/Si structures have fundamental frequency of 129.28
MHz for uncoated, 128.85
MHz and 126.93
MHz for coated Pt/ZnO sensing layer corresponding to the conventional and layered structures, respectively. The layered SAW structure using Pt/ZnO nanoparticles as sensing layer show frequency shift of 55
kHz in 1% H
2 concentration at room temperature with good repeatability and stability. This paper describes the fabrication and characterization of surface acoustic wave (SAW) hydrogen sensors using ZnO nanoparticles incorporated with a Pt catalyst for hydrogen detection at room temperature. The Pt/ZnO nanoparticle sensing layer was deposited onto SAW delay line sensor-based interdigitated electrodes (IDTs)/aluminum nitride (AlN)/silicon (Si) structure. The average ZnO crystallite sizes varied from 30nm to 40nm and were synthesized by a sol–gel method and deposited onto SAW sensors by spin coating. The Pt-like catalyst was deposited onto ZnO nanoparticles by RF sputtering for 2s. The effect of ZnO crystalline quality, crystallite size and humidity on hydrogen sensing performance was evaluated. Moreover, the sensitivity of SAW delay line sensors as they depend on conventional structures and layered structures were also characterized in this work. The SAW delay line sensors using AlN/Si structures have fundamental frequency of 129.28MHz for uncoated, 128.85MHz and 126.93MHz for coated Pt/ZnO sensing layer corresponding to the conventional and layered structures, respectively. The layered SAW structure using Pt/ZnO nanoparticles as sensing layer show frequency shift of 55kHz in 1% H₂ concentration at room temperature with good repeatability and stability. |
Author | Phan, Duy-Thach Chung, Gwiy-Sang |
Author_xml | – sequence: 1 givenname: Duy-Thach surname: Phan fullname: Phan, Duy-Thach – sequence: 2 givenname: Gwiy-Sang surname: Chung fullname: Chung, Gwiy-Sang email: gschung@ulsan.ac.kr |
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SubjectTerms | acoustics AlN thin film catalysts coatings crystallites electrodes humidity hydrogen Hydrogen sensor nanoparticles Pt catalyst SAW silicon sol-gel processing temperature zinc oxide ZnO nanoparticles |
Title | Surface acoustic wave hydrogen sensors based on ZnO nanoparticles incorporated with a Pt catalyst |
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