APA (7th ed.) Citation

Biebuyck, H. A., Larsen, N. B., Delamarche, E., & Michel, B. (1997). Lithography beyond light: Microcontact printing with monolayer resists. IBM journal of research and development, 41(1.2), 159-170. https://doi.org/10.1147/rd.411.0159

Chicago Style (17th ed.) Citation

Biebuyck, H. A., N. B. Larsen, E. Delamarche, and B. Michel. "Lithography Beyond Light: Microcontact Printing with Monolayer Resists." IBM Journal of Research and Development 41, no. 1.2 (1997): 159-170. https://doi.org/10.1147/rd.411.0159.

MLA (9th ed.) Citation

Biebuyck, H. A., et al. "Lithography Beyond Light: Microcontact Printing with Monolayer Resists." IBM Journal of Research and Development, vol. 41, no. 1.2, 1997, pp. 159-170, https://doi.org/10.1147/rd.411.0159.