Structural characterization of polycrystalline thin films by X-ray diffraction techniques
X-ray diffraction (XRD) techniques are powerful, non-destructive characterization tool with minimal sample preparation. XRD provides the first information about the materials phases, crystalline structure, average crystallite size, micro and macro strain, orientation parameter, texture coefficient,...
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| Published in | Journal of materials science. Materials in electronics Vol. 32; no. 2; pp. 1341 - 1368 |
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| Main Authors | , , , |
| Format | Journal Article |
| Language | English |
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New York
Springer US
01.01.2021
Springer Nature B.V |
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| Abstract | X-ray diffraction (XRD) techniques are powerful, non-destructive characterization tool with minimal sample preparation. XRD provides the first information about the materials phases, crystalline structure, average crystallite size, micro and macro strain, orientation parameter, texture coefficient, degree of crystallinity, crystal defects etc. XRD analysis provides information about the bulk, polycrystalline thin films, and multilayer structures, which is very important in various scientific and material engineering fields. This review discusses the diffraction related phenomena/principles such as powder X-ray diffraction, and thin-film/grazing incidence X-ray diffraction (GIXRD) comprehensively for thin film samples which are used frequently in various branches of science and technology. The review also covers few case studies on polycrystalline thin-film samples related to phase analysis, preferred orientation parameter (texture coefficient) analysis, stress evaluation in thin films and multilayer, multiphase content identification, bifurcation of multiphase on multilayer samples, depth profiling in thin-film/ multilayer structures, the impact of doping effect on structural properties of thin films etc., comprehensively using GIXRD/XRD. |
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| AbstractList | X-ray diffraction (XRD) techniques are powerful, non-destructive characterization tool with minimal sample preparation. XRD provides the first information about the materials phases, crystalline structure, average crystallite size, micro and macro strain, orientation parameter, texture coefficient, degree of crystallinity, crystal defects etc. XRD analysis provides information about the bulk, polycrystalline thin films, and multilayer structures, which is very important in various scientific and material engineering fields. This review discusses the diffraction related phenomena/principles such as powder X-ray diffraction, and thin-film/grazing incidence X-ray diffraction (GIXRD) comprehensively for thin film samples which are used frequently in various branches of science and technology. The review also covers few case studies on polycrystalline thin-film samples related to phase analysis, preferred orientation parameter (texture coefficient) analysis, stress evaluation in thin films and multilayer, multiphase content identification, bifurcation of multiphase on multilayer samples, depth profiling in thin-film/ multilayer structures, the impact of doping effect on structural properties of thin films etc., comprehensively using GIXRD/XRD. |
| Author | Pandey, Akhilesh Dutta, Shankar Dixit, Ambesh Dalal, Sandeep |
| Author_xml | – sequence: 1 givenname: Akhilesh orcidid: 0000-0001-7297-8823 surname: Pandey fullname: Pandey, Akhilesh email: akhilesh.physics@gmail.com organization: Solid-State Physics Laboratory, DRDO – sequence: 2 givenname: Sandeep surname: Dalal fullname: Dalal, Sandeep organization: Solid-State Physics Laboratory, DRDO – sequence: 3 givenname: Shankar surname: Dutta fullname: Dutta, Shankar organization: Solid-State Physics Laboratory, DRDO – sequence: 4 givenname: Ambesh surname: Dixit fullname: Dixit, Ambesh organization: Department of Physics, Indian Institute of Technology |
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| Snippet | X-ray diffraction (XRD) techniques are powerful, non-destructive characterization tool with minimal sample preparation. XRD provides the first information... |
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| StartPage | 1341 |
| SubjectTerms | Characterization and Evaluation of Materials Chemistry and Materials Science Crystal defects Crystal structure Crystallinity Crystallites Degree of crystallinity Depth profiling Materials Science Multilayers Multiphase Nondestructive testing Optical and Electronic Materials Parameters Polycrystals Preferred orientation Review Structural analysis Texture Thin films X ray powder diffraction X-ray diffraction |
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| Title | Structural characterization of polycrystalline thin films by X-ray diffraction techniques |
| URI | https://link.springer.com/article/10.1007/s10854-020-04998-w https://www.proquest.com/docview/2491437583 |
| Volume | 32 |
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