Structural, plasmonic and electronic properties of zirconium carbonitride thin films prepared by dual ion beam deposition - Liu, Tingting; Ran, Yujing; Wang, Tianrun; Yu, Xiaoting; Hu, Guangxiao; Jiang, Zhaotan; Wang, Zhi (Applied physics. A, Materials science & processing, 2023)
Keywords: Applied physics; Carbon content; Carbon nitride; Carrier density; Characterization and Evaluation of Materials; Condensed Matter Physics; Crystal defects; Deposition; Electron states; Ion beams; Machines; Manufacturing; Materials science; Mathematical analysis; Nanotechnology; Optical and Electronic Materials; Physics; Physics and Astronomy; Plasma frequencies; Plasmonics; Processes; Surfaces and Interfaces; Thin Films; Zirconium carbide; Thin films; Electronic structure; Zirconium carbonitride; Assisting ions; Plasmonic