Studies of the micromorphology of sputtered TiN thin films by autocorrelation techniques

• Published in: European physical journal plus Vol. 132; no. 12; p. 520
• Main Authors: Smagoń, Kamil, Stach, Sebastian, Ţălu, Ştefan, Arman, Ali, Achour, Amine, Luna, Carlos, Ghobadi, Nader, Mardani, Mohsen, Hafezi, Fatemeh, Ahmadpourian, Azin, Ganji, Mohsen, Grayeli Korpi, Alireza
• Format: Journal Article
• Language: English
• Published: Berlin/Heidelberg Springer Berlin Heidelberg 01.12.2017; Springer Nature B.V
• Subjects: Applied and Technical Physics; Atomic; Atomic force microscopy; Autocorrelation functions; Complex Systems; Condensed Matter Physics; Glass substrates; Isotropy; Magnetron sputtering; Mathematical and Computational Physics; Molecular; Optical and Plasma Physics; Parameter modification; Physics; Physics and Astronomy; Regular Article; Substrates; Surface properties; Surface structure; Theoretical; Thin films; Titanium nitride

. Autocorrelation techniques are crucial tools for the study of the micromorphology of surfaces: They provide the description of anisotropic properties and the identification of repeated patterns on the surface, facilitating the comparison of samples. In the present investigation, some fundamental c...