Effect of oxygen flow on the optical properties of hafnium oxide thin films by dual-ion beam sputtering deposition - Fang, Shaobo; Ma, Chong; Liu, Weiming; He, Junbo; Wang, Cheng; Chen, Gang; Liu, Dingquan; Zhang, Rongjun (Applied physics. A, Materials science & processing, 2022)
Keywords: Applied physics; Characterization and Evaluation of Materials; Condensed Matter Physics; Crystallization; Deposition; Flow velocity; Hafnium oxide; Ion beam sputtering; Ion beams; Ion sources; Machines; Manufacturing; Materials science; Microscopy; Nanotechnology; Optical and Electronic Materials; Optical properties; Orthorhombic phase; Oxide coatings; Oxygen; Physics; Physics and Astronomy; Processes; Refractivity; Surface roughness; Surfaces and Interfaces; Thin Films; Vacuum chambers; Oxygen flow; Hafnium oxide film; Dual-ion beam sputtering