Experimental research on damage and formation limits on porous silicon materials by electrochemical etching method - Ge, Daohan; Rezk, Ahmed; Zhao, Chengxiang; Hu, Zhou; Zhang, Liqiang (Journal of materials research, 2022)
Keywords: Anodizing; Applied and Technical Physics; Biomaterials; Chemistry and Materials Science; Damage; Electrochemical etching; Etching; Inorganic Chemistry; Materials Engineering; Materials research; Materials Science; Nanotechnology; Oxide coatings; Parameter sensitivity; Pore formation; Porous materials; Porous silicon; Residual stress; Silicon; Porosity; Microstructure; Scanning electron microscopy (SEM); Porous silicon; Residual stress; Defects