Study of the Electrical and Diffusion Barrier Properties in Ultrathin Carbon Film-Coated Copper Microwires for Interconnects - Chang, Chang-Shuo; Wang, Da-Jiun; Li, Tse-Chang; Shen, Chang-Hong; Jing, Yuan-Chou; Wu, Gien-Huang; Lin, Jen-Fin (Journal of materials engineering and performance, 2019)
Keywords: ANNEALING; CARBON; Characterization and Evaluation of Materials; Chemistry and Materials Science; COPPER; Corrosion and Coatings; ELECTRIC CONDUCTIVITY; Engineering Design; LEAKAGE CURRENT; MATERIALS SCIENCE; PERMITTIVITY; Quality Control; Reliability; Safety and Risk; SILICA; SILICON OXIDES; Tribology; diffusion barrier; ultrathin carbon film; electrical properties; rapid thermal annealing; nano-copper wire