Fine ablation with depth control of 25-nm resolution and morphologies irradiated by femtosecond laser pulses via beam shaping

• Published in: Applied physics. A, Materials science & processing Vol. 129; no. 8
• Main Authors: Shin, Young-Gwan, Choi, Junha, Cho, Sung-Hak
• Format: Journal Article
• Language: English
• Published: Berlin/Heidelberg Springer Berlin Heidelberg 01.08.2023; Springer Nature B.V
• Subjects: Ablation; Applied physics; Burrs; Carbide tools; Cemented carbides; Ceramic tools; Characterization and Evaluation of Materials; Condensed Matter Physics; Cutting tools; Energy distribution; Femtosecond pulsed lasers; Femtosecond pulses; Fluence; Gaussian beams (optics); Laser beams; Lasers; Machines; Machining; Manufacturing; Materials science; Micrometers; Multilayers; Nanotechnology; Normal distribution; Optical and Electronic Materials; Physics; Physics and Astronomy; Processes; Surfaces and Interfaces; Technology utilization; Thickness; Thin Films; Tungsten carbide; Femtosecond laser; Ablation depth control; Laser energy distribution; Cutting tool; Cemented tungsten carbides

Recently, the need for enhanced cutting tools to fabricate next-generation multilayer ceramic capacitors (MLCCs) and batteries has been identified. This is because existing cutting tools cause problems such as defects, burrs, and breaking of MLCCs when the MLCCs are cut using the existing cutting to...