Fine ablation with depth control of 25-nm resolution and morphologies irradiated by femtosecond laser pulses via beam shaping - Shin, Young-Gwan; Choi, Junha; Cho, Sung-Hak (Applied physics. A, Materials science & processing, 2023)
Keywords: Ablation; Applied physics; Burrs; Carbide tools; Cemented carbides; Ceramic tools; Characterization and Evaluation of Materials; Condensed Matter Physics; Cutting tools; Energy distribution; Femtosecond pulsed lasers; Femtosecond pulses; Fluence; Gaussian beams (optics); Laser beams; Lasers; Machines; Machining; Manufacturing; Materials science; Micrometers; Multilayers; Nanotechnology; Normal distribution; Optical and Electronic Materials; Physics; Physics and Astronomy; Processes; Surfaces and Interfaces; Technology utilization; Thickness; Thin Films; Tungsten carbide; Femtosecond laser; Ablation depth control; Laser energy distribution; Cutting tool; Cemented tungsten carbides