Highly precise Ti/Pt/Cr/Au thin-film temperature sensor embedded in a microfluidic device

• Published in: Rare metals Vol. 40; no. 1; pp. 195 - 201
• Main Authors: Wang, Jie-Jun, Wang, Tao, Wu, Chuan-Gui, Luo, Wen-Bo, Shuai, Yao, Zhang, Wang-Li
• Format: Journal Article
• Language: English
• Published: Beijing Nonferrous Metals Society of China 01.01.2021; Springer Nature B.V
• Subjects: Annealing; Biomaterials; Chemistry and Materials Science; Chromium; Depletion; Direct current; Energy; Gold; Materials Engineering; Materials Science; Metallic Materials; Multilayers; Nanoscale Science and Technology; Physical Chemistry; Platinum; Recrystallization; Sensors; Temperature; Temperature sensors; Thin films; Vacuum evaporation; Ti/Pt/Cr/Au layer; Temperature coefficient of resistance (TCR); Annealing process; Recrystallization; Microfluidic device

A multilayer (Ti/Pt/Cr/Au) resistive temperature sensor was proposed and investigated to precisely measure the temperature characteristic in microfluidic devices. The Ti/Pt/Cr/Au sensor was fabricated by direct current (DC) sputtering, vacuum evaporation and liftoff process. The thermal annealing te...