Highly precise Ti/Pt/Cr/Au thin-film temperature sensor embedded in a microfluidic device - Wang, Jie-Jun; Wang, Tao; Wu, Chuan-Gui; Luo, Wen-Bo; Shuai, Yao; Zhang, Wang-Li (Rare metals, 2021)
Keywords: Annealing; Biomaterials; Chemistry and Materials Science; Chromium; Depletion; Direct current; Energy; Gold; Materials Engineering; Materials Science; Metallic Materials; Multilayers; Nanoscale Science and Technology; Physical Chemistry; Platinum; Recrystallization; Sensors; Temperature; Temperature sensors; Thin films; Vacuum evaporation; Ti/Pt/Cr/Au layer; Temperature coefficient of resistance (TCR); Annealing process; Recrystallization; Microfluidic device