Dynamic simulation of a contact-enhanced MEMS inertial switch in Simulink

• Published in: Microsystem technologies : sensors, actuators, systems integration Vol. 17; no. 8; pp. 1329 - 1342
• Main Authors: Yang, Zhuoqing, Cai, Haogang, Ding, Guifu, Wang, Hong, Zhao, Xiaolin
• Format: Journal Article
• Language: English
• Published: Berlin/Heidelberg Springer-Verlag 01.08.2011; Springer
• Subjects: Applied sciences; Electronics; Electronics and Microelectronics; Engineering; Exact sciences and technology; Instrumentation; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Integrated circuits; Integrated circuits by function (including memories and processors); Mechanical Engineering; Mechanical instruments, equipment and techniques; Micromechanical devices and systems; Nanotechnology; Physics; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Technical Paper; Proof Mass; Contact Point; Squeeze Film; Traditional Design; Shock Acceleration; Point contact; Vibration; Circuit design; Quasi static theory; Mechanical contact; Experimental study; Modeling; Microrelay; Spring mass system; Stationary condition; Natural frequency; Dynamic contact; Rebound; Selector switch; Dynamic model; Microelectromechanical device; Threshold

A novel contact-enhanced design of MEMS (micro-electro-mechanical system) inertial switch was proposed and modeled in Simulink ® . The contact effect is improved by an easily realized modification on the traditional design, i.e. introducing a movable contact point between the movable electrode (proo...