Thermopile-based THz antenna

• Published in: Microsystem technologies Vol. 18; no. 7-8; pp. 849 - 856
• Main Authors: Szentpáli, Béla, Matyi, Gábor, Fürjes, Péter, László, Endre, Battistig, Gábor, Bársony, István, Károlyi, Gergely, Berceli, Tibor
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Berlin/Heidelberg Springer-Verlag 01.08.2012; Springer
• Subjects: Electronics and Microelectronics; Engineering; Exact sciences and technology; Instrumentation; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical Engineering; Mechanical instruments, equipment and techniques; Micromechanical devices and systems; Nanotechnology; Physics; Technical Paper; Full Wave Electromagnetic Simulation; Direct Electric Heating; SiH2Cl2; Print Circuit Board; Antenna Strip; GHz range; Semiconductor materials; Thermocouples; Micromachining; Bolometers; Seebeck effect; Experimental study; Thermopiles; Temperature measurement; THz range; Thermal radiation; Output voltage; Silicon; IV characteristic

This work is intended to describe the design aspects and to characterize the functionality of a novel thermopile structure applicable for detecting millimetre range and THz radiation. The proposed thermopile consists of a series of micromachined poly-crystalline silicon thermocouple strips arranged...