Processes of Thin Film Formation Using Ion Beam Assist

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Bibliographic Details
Published inJOURNAL OF THE JAPAN WELDING SOCIETY Vol. 71; no. 4; pp. 214 - 218
Main Authors TAKANO, Ichiro, NAKAMURA, Isao, SAWADA, Yoshio
Format Journal Article
LanguageJapanese
Published JAPAN WELDING SOCIETY 2002
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ISSN:0021-4787
1883-7204
DOI:10.2207/qjjws1943.71.214