Intrinsic Amorphous Silicon Bilayers for Effective Surface Passivation in Silicon Heterojunction Solar Cells: A Comparative Study of Interfacial Layers

• Published in: Physica status solidi. A, Applications and materials science Vol. 218; no. 9
• Main Authors: Sai, Hitoshi, Hsu, Hung-Jung, Chen, Po-Wei, Chen, Pei-Ling, Matsui, Takuya
• Format: Journal Article
• Language: English
• Published: Weinheim Wiley Subscription Services, Inc 01.05.2021
• Subjects: Amorphous silicon; Chemical vapor deposition; Comparative studies; Fourier transform infrared spectroscopy; Heterojunctions; hydrogen; Hydrogen bonds; Infrared absorption; Microstructure; Parameter modification; Passivity; Photovoltaic cells; plasma chemical vapor deposition; Process parameters; Silicon; silicon solar cells; Solar cells; surface passivation

The impact of intrinsic amorphous silicon bilayers in amorphous silicon/crystalline silicon (a‐Si:H/c‐Si) heterojunction solar cells is investigated. Intrinsic a‐Si:H films with a wide range of film densities and hydrogen contents are prepared via a plasma‐enhanced chemical vapor deposition (PECVD)...