Surface topography measurement of microstructures near the lateral resolution limit via coherence scanning interferometry

• Published in: Optics and lasers in engineering Vol. 152; p. 106949
• Main Authors: Sun, Yifeng, Gao, Zhishan, Ma, Jianqiu, Zhou, Juntao, Xie, Pengfei, Wang, Lingjie, Lei, Lihua, Fu, Yunxia, Guo, Zhenyan, Yuan, Qun
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.05.2022
• Subjects: Coherence scanning interferometry; Lateral resolution limit; Microstructure; Surface topography; Lateral resolution limit; Surface topography; Microstructure; Coherence scanning interferometry

•Surface topography measurement near CSI lateral resolution limit is realised.•Characteristics of anomalous coherence signals are analysed.•Binarization method based on edge localization is proposed.•A new form of the Morlet wavelet family is constructed.•Measurements are consistent with SEM results...