A Novel Design of Modular Bearingless PMSM Motor for Ultra Clean Applications

• Published in: IEEE access Vol. 12; pp. 21576 - 21585
• Main Authors: Humza, Muhammad, Noh, Sujin, Jeong, Hye-Sun, Yazdan, Tanveer, Doukhi, Oualid, Cho, Han-Wook
• Format: Journal Article
• Language: English
• Published: Piscataway IEEE 2024; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Assemblies; Assembly; Bearingless motor; Cleanrooms; Controllability; decoupled suspension; Decoupling; design; FEM analysis; Finite element method; Force; Levitation; Magnetic bearings; Magnetic flux; Magnetic levitation; Mathematical models; Modular design; modular PMSM motor; Permanent magnet motors; Predictive control; Reluctance motors; Rotors; Stators; Synchronous motors; Torque; Windings

This paper introduces a novel design for achieving bearingless operation in a modular PMSM motor, specifically used for ultra-cleanroom applications in semiconductor wafer production. In order to achieve this operation, a stable and independent suspension of the rotor is crucial, which can be obtain...